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High perfection chirped grating phase masks by electron-beam definition

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dc.contributor.author Rogers, C en
dc.contributor.author Goodchild, D en
dc.contributor.author Baulcomb, R en
dc.contributor.author Butler, M en
dc.contributor.author Hoyle, P en
dc.contributor.author Kanellopoulos, S en
dc.contributor.author Clements, S en
dc.contributor.author Pugh, B en
dc.date.accessioned 2014-03-01T01:48:02Z
dc.date.available 2014-03-01T01:48:02Z
dc.date.issued 1999 en
dc.identifier.uri http://hdl.handle.net/123456789/25387
dc.subject Electron Beam en
dc.title High perfection chirped grating phase masks by electron-beam definition en
heal.type journalArticle en
heal.identifier.primary 10.1116/1.590983 en
heal.identifier.secondary http://dx.doi.org/10.1116/1.590983 en
heal.publicationDate 1999 en
heal.journalName Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures en
dc.identifier.doi 10.1116/1.590983 en


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