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Nanoindentation studies of multilayer amorphous carbon films

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dc.contributor.author Logothetidis, S en
dc.contributor.author Kassavetis, S en
dc.contributor.author Charitidis, C en
dc.contributor.author Panayiotatos, Y en
dc.contributor.author Laskarakis, A en
dc.date.accessioned 2014-03-01T01:53:28Z
dc.date.available 2014-03-01T01:53:28Z
dc.date.issued 2004 en
dc.identifier.uri http://hdl.handle.net/123456789/27023
dc.subject Amorphous Carbon en
dc.subject Elastic Modulus en
dc.subject Large Deviation en
dc.subject Measurement Technique en
dc.subject Mechanical Property en
dc.subject Spectroscopic Ellipsometry en
dc.subject Thin Film en
dc.title Nanoindentation studies of multilayer amorphous carbon films en
heal.type journalArticle en
heal.identifier.primary 10.1016/j.carbon.2003.12.054 en
heal.identifier.secondary http://dx.doi.org/10.1016/j.carbon.2003.12.054 en
heal.publicationDate 2004 en
heal.abstract The mechanical properties of multilayer amorphous carbon thin films, consisted of sequential sp3- and sp2-rich layers developed on c-Si, were investigated by nanoindentation. The total (∼100 nm) and bilayer (14–45 nm) thickness, and the sp3 and sp2 carbon bonded content, were determined by spectroscopic ellipsometry. The continuous stiffness measurements technique was used to measure hardness (H) and elastic modulus (E), en
heal.journalName Carbon en
dc.identifier.doi 10.1016/j.carbon.2003.12.054 en


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