Simulation of reactive sputtering from a concentric dual-source magnetron in roll-to-roll coating processes

Tsiogas, C; Avaritsiotis, J

dc.contributor.author	Tsiogas, C	en
dc.contributor.author	Avaritsiotis, J	en
dc.date.accessioned	2014-03-01T01:10:17Z
dc.date.available	2014-03-01T01:10:17Z
dc.date.issued	1994	en
dc.identifier.issn	0042-207X	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/11352
dc.subject	Reactive Sputtering	en
dc.subject.classification	Materials Science, Multidisciplinary	en
dc.subject.classification	Physics, Applied	en
dc.subject.other	Coating techniques	en
dc.subject.other	Composition	en
dc.subject.other	Film growth	en
dc.subject.other	Geometry	en
dc.subject.other	Indium	en
dc.subject.other	Magnetrons	en
dc.subject.other	Mathematical models	en
dc.subject.other	Metallic films	en
dc.subject.other	Oxides	en
dc.subject.other	Substrates	en
dc.subject.other	Systems analysis	en
dc.subject.other	Tin	en
dc.subject.other	Alloy metal oxide films	en
dc.subject.other	Concentric dual source magnetron	en
dc.subject.other	Electrically isolated concentric targets	en
dc.subject.other	Indium-tin system	en
dc.subject.other	Reactive sputtering	en
dc.subject.other	Roll to roll coating	en
dc.subject.other	Sputter deposition	en
dc.title	Simulation of reactive sputtering from a concentric dual-source magnetron in roll-to-roll coating processes	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/0042-207X(94)90323-9	en
heal.identifier.secondary	http://dx.doi.org/10.1016/0042-207X(94)90323-9	en
heal.language	English	en
heal.publicationDate	1994	en
heal.abstract	The performance of a magnetron system with two, electrically isolated concentric targets, which may be used for the deposition of reactively sputtered alloy metal oxide films has been simulated at relatively low pressures, using a steady state model which takes the specific system geometry into consideration. The proposed model not only allows for the calculation of the radial thickness and composition distributions of the growing film, but it also enables the investigation of the behaviour of the system when several process parameters are varied, making easier the optimization of its geometrical configuration, i.e. the selection of the inter-ring distances as well as the target-to-substrate separation. The simulation results for roll-to-roll coating using an indium-tin system, are in good agreement with experimental results reported by other investigators. © 1994.	en
heal.publisher	PERGAMON-ELSEVIER SCIENCE LTD	en
heal.journalName	Vacuum	en
dc.identifier.doi	10.1016/0042-207X(94)90323-9	en
dc.identifier.isi	ISI:A1994ND40500018	en
dc.identifier.volume	45	en
dc.identifier.issue	4	en
dc.identifier.spage	473	en
dc.identifier.epage	481	en