Radio-frequency plasmas in CF4: Self-consistent modeling of the plasma physics and chemistry

Mantzaris, NV; Boudouvis, A; Gogolides, E

dc.contributor.author	Mantzaris, NV	en
dc.contributor.author	Boudouvis, A	en
dc.contributor.author	Gogolides, E	en
dc.date.accessioned	2014-03-01T01:11:27Z
dc.date.available	2014-03-01T01:11:27Z
dc.date.issued	1995	en
dc.identifier.issn	0021-8979	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/11643
dc.subject.classification	Physics, Applied	en
dc.subject.other	LASER-INDUCED FLUORESCENCE	en
dc.subject.other	RADIOFREQUENCY GLOW-DISCHARGES	en
dc.subject.other	ELECTRON-IMPACT IONIZATION	en
dc.subject.other	NEGATIVE-ION DENSITIES	en
dc.subject.other	CROSS-SECTIONS	en
dc.subject.other	NEUTRAL RADICALS	en
dc.subject.other	SILICON	en
dc.subject.other	ATTACHMENT	en
dc.subject.other	GASES	en
dc.subject.other	C2F6	en
dc.title	Radio-frequency plasmas in CF4: Self-consistent modeling of the plasma physics and chemistry	en
heal.type	journalArticle	en
heal.identifier.primary	10.1063/1.359143	en
heal.identifier.secondary	http://dx.doi.org/10.1063/1.359143	en
heal.language	English	en
heal.publicationDate	1995	en
heal.abstract	A self-consistent, one-dimensional simulator for the physics and chemistry of radio frequency plasmas is developed and applied for CF4. The simulator consists of a fluid model for the discharge, a commercial Boltzmann code for calculations of electron energy distribution function (EEDF), a generalized plasma chemistry code, and an interface among the three models. Chemistry calculations are fed back into the physics model and the procedure is repeated until a self-consistent solution is obtained. The CF4 discharge shows an electronegative behavior with ten times more negative ions than electrons even at low pressures of 100 mTorr. The EEDF high energy tail lies between the Maxwell and Druyvensteyn distribution. The chemistry model predicts densities of 3.5×1012 cm-3 for CF 3, 3×1012 cm-3 for CF2, 2.5×1013 cm-3 for F, and 0.7×1012 cm-3 for CF, in agreement with experimental data from a Japanese group. CF and to a lesser extent CF2, are consumed at the surface, and CF, CF2, and F densities and profiles are sensitive to the sticking coefficient and residence time. CF2 and CF are produced mainly from the parent gas CF4 and not its fragments. Finally, the chemistry results are fed back into the physics model and influence the discharge structure, mainly by changing electron densities and the width of the inner core of the positive-negative ion plasma. Thus, the importance of self-consistent plasma calculations is demonstrated and justified. © 1995 American Institute of Physics.	en
heal.publisher	AMER INST PHYSICS	en
heal.journalName	Journal of Applied Physics	en
dc.identifier.doi	10.1063/1.359143	en
dc.identifier.isi	ISI:A1995RD57200011	en
dc.identifier.volume	77	en
dc.identifier.issue	12	en
dc.identifier.spage	6169	en
dc.identifier.epage	6180	en