Instabilities and multiple steady states of radio-frequency discharges in CF4

Metsi, E; Gogolides, E; Boudouvis, A

dc.contributor.author	Metsi, E	en
dc.contributor.author	Gogolides, E	en
dc.contributor.author	Boudouvis, A	en
dc.date.accessioned	2014-03-01T01:12:01Z
dc.date.available	2014-03-01T01:12:01Z
dc.date.issued	1996	en
dc.identifier.issn	1063-651X	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/11919
dc.subject	Multiple Steady States	en
dc.subject	Radio Frequency	en
dc.subject.classification	Physics, Fluids & Plasmas	en
dc.subject.classification	Physics, Mathematical	en
dc.subject.other	RADIOFREQUENCY GLOW-DISCHARGES	en
dc.subject.other	CURRENT ELECTRICAL DISCHARGES	en
dc.subject.other	PARALLEL-PLANE ELECTRODES	en
dc.subject.other	ELECTRONEGATIVE GASES	en
dc.subject.other	POSITIVE-COLUMN	en
dc.subject.other	RF DISCHARGES	en
dc.subject.other	OSCILLATIONS	en
dc.subject.other	PLASMAS	en
dc.subject.other	SF6	en
dc.title	Instabilities and multiple steady states of radio-frequency discharges in CF4	en
heal.type	journalArticle	en
heal.identifier.primary	10.1103/PhysRevE.54.782	en
heal.identifier.secondary	http://dx.doi.org/10.1103/PhysRevE.54.782	en
heal.language	English	en
heal.publicationDate	1996	en
heal.abstract	A one-dimensional fluid model coupled with solution tracking algorithms was applied for an L = 5 mm CF4 (radio frequency) rf discharge at P = 2 Torr (low PL value of PL = I). The discharge exhibited a rich behavior of solution multiplicity as a function oi applied rf current density (or voltage). The most prominent characteristic was the development of de self-bias and asymmetry under completely symmetric discharge conditions, in agreement with experimental data by J. Butterbaugh (Ph.D. dissertation, Massachusetts Institute of Technology, 1990). The plasma can exist In three states of positive, negative, and zero self-bias, of which the first two Lire asymmetric and stable, while the third is symmetric and unstable. The two asymmetric solutions collapse again into one symmetric solution with zero self-bias at a higher voltage, a transition which depends on the value of the secondary electron emission coefficient. At lower applied currents (or voltages) the hysterisis loop of this electronegative plasma is presented between breakdown and extinction, and an unstable plasma is found between die two points. The observed phenomena are related to the transition of the discharge from diffusion-controlled to electron-oscillation-amplitude-controlled breakdowns. The sustaining mechanisms of the plasma and the electron dynamics are discussed.	en
heal.publisher	AMERICAN PHYSICAL SOC	en
heal.journalName	Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics	en
dc.identifier.doi	10.1103/PhysRevE.54.782	en
dc.identifier.isi	ISI:A1996UY73400095	en
dc.identifier.volume	54	en
dc.identifier.issue	1	en
dc.identifier.spage	782	en
dc.identifier.epage	790	en