Deposition of YBa2Cu3O7-δ thin films over large areas with a simple sputtering technique for microwave applications

Moraitakis, E; Anagnostou, M; Pissas, M; Psyharis, V; Niarchos, D; Stratakos, G

dc.contributor.author	Moraitakis, E	en
dc.contributor.author	Anagnostou, M	en
dc.contributor.author	Pissas, M	en
dc.contributor.author	Psyharis, V	en
dc.contributor.author	Niarchos, D	en
dc.contributor.author	Stratakos, G	en
dc.date.accessioned	2014-03-01T01:13:39Z
dc.date.available	2014-03-01T01:13:39Z
dc.date.issued	1998	en
dc.identifier.issn	0953-2048	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/12639
dc.subject.classification	Physics, Applied	en
dc.subject.classification	Physics, Condensed Matter	en
dc.title	Deposition of YBa2Cu3O7-δ thin films over large areas with a simple sputtering technique for microwave applications	en
heal.type	journalArticle	en
heal.identifier.primary	10.1088/0953-2048/11/7/012	en
heal.identifier.secondary	http://dx.doi.org/10.1088/0953-2048/11/7/012	en
heal.language	English	en
heal.publicationDate	1998	en
heal.abstract	dA simple sputtering technique is presented for the fabrication of YBa2Cu3O7-delta (YBCO) films over large areas. The magnetron sputtering source combines operation in an unbalanced magnetic field configuration and use of large YBCO targets. YBCO films were deposited on LaAlO3 (100) substrates with sizes up to 1 in x 1 in. The films are characterized by x-ray diffraction, pole figures, ac susceptibility, transport properties and thickness uniformity. The results show that these films are of good quality with perfect c-axis orientation, epitaxial growth, critical temperature of greater than or equal to 90 K, critical current density of greater than or equal to 1 x 10(6) A cm(-2) at 77 K and thickness uniformity better than 5% over an 1 in x 1 in substrate. A two-pole bandpass filter with centre frequency of 13 GHz and 3 dB fractional bandwith of about 15% was designed to test the microwave performance of these films. A YBCO filter exhibits at 77 K an insertion loss of more than 5 dB lower than an equivalent Au filter on LaAlO3 substrate at the same temperature.	en
heal.publisher	IOP PUBLISHING LTD	en
heal.journalName	Superconductor Science and Technology	en
dc.identifier.doi	10.1088/0953-2048/11/7/012	en
dc.identifier.isi	ISI:000074781900011	en
dc.identifier.volume	11	en
dc.identifier.issue	7	en
dc.identifier.spage	686	en
dc.identifier.epage	691	en