Thin film thickness sensor based on a new magnetostrictive delay line arrangement

Hristoforou, E; Chiriac, H; Avaritsiotis, JN

dc.contributor.author	Hristoforou, E	en
dc.contributor.author	Chiriac, H	en
dc.contributor.author	Avaritsiotis, JN	en
dc.date.accessioned	2014-03-01T01:15:20Z
dc.date.available	2014-03-01T01:15:20Z
dc.date.issued	1999	en
dc.identifier.issn	0924-4247	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/13439
dc.subject	magnetostriction	en
dc.subject	thin films	en
dc.subject	film thickness sensors	en
dc.subject.classification	Engineering, Electrical & Electronic	en
dc.subject.classification	Instruments & Instrumentation	en
dc.subject.other	Computer simulation	en
dc.subject.other	Electric currents	en
dc.subject.other	Electric potential	en
dc.subject.other	Fourier transforms	en
dc.subject.other	Magnetic fields	en
dc.subject.other	Magnetostriction	en
dc.subject.other	Thickness measurement	en
dc.subject.other	Thin films	en
dc.subject.other	Air gaps	en
dc.subject.other	Magnetostrictive delay line arrangement	en
dc.subject.other	Output voltage	en
dc.subject.other	Thin film thickness sensors	en
dc.subject.other	Sensors	en
dc.title	Thin film thickness sensor based on a new magnetostrictive delay line arrangement	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0924-4247(98)00376-8	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0924-4247(98)00376-8	en
heal.language	English	en
heal.publicationDate	1999	en
heal.abstract	In this paper we demonstrate the application of a new magnetostrictive delay line (MDL) arrangement in thin film thickness determination, during film production. According to this new set-up, the MDL arrangement can be miniaturized in the micrometer scale, without the use of coils and air gaps, thus allowing a simple and cost-effective manufacturing process. Experimental results indicate monotonic response and absence of hysteresis, thus allowing a good uncertainty of measurement. (C) 1999 Elsevier Science S.A. All rights reserved.	en
heal.publisher	Elsevier Sequoia SA, Lausanne, Switzerland	en
heal.journalName	Sensors and Actuators, A: Physical	en
dc.identifier.doi	10.1016/S0924-4247(98)00376-8	en
dc.identifier.isi	ISI:000083925200026	en
dc.identifier.volume	76	en
dc.identifier.issue	1-3	en
dc.identifier.spage	156	en
dc.identifier.epage	161	en