Magneto-surface-acoustic-waves microdevice using thin film technology: Design and fabrication process

Chiriac, H; Pletea, M; Hristoforou, E

dc.contributor.author	Chiriac, H	en
dc.contributor.author	Pletea, M	en
dc.contributor.author	Hristoforou, E	en
dc.date.accessioned	2014-03-01T01:16:41Z
dc.date.available	2014-03-01T01:16:41Z
dc.date.issued	2001	en
dc.identifier.issn	0924-4247	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/14174
dc.subject	Magnetic properties	en
dc.subject	Magneto-surface-acoustic-waves (MSAWs) microdevice	en
dc.subject	Magnetoelastic (ME) characteristics	en
dc.subject	Magnetostrictive thin films	en
dc.subject	Thin film technology	en
dc.subject.classification	Engineering, Electrical & Electronic	en
dc.subject.classification	Instruments & Instrumentation	en
dc.subject.other	Amorphous films	en
dc.subject.other	Elastic moduli	en
dc.subject.other	Iron alloys	en
dc.subject.other	Magnetic anisotropy	en
dc.subject.other	Magnetic properties	en
dc.subject.other	Magnetic thin films	en
dc.subject.other	Magnetization	en
dc.subject.other	Magnetostriction	en
dc.subject.other	Microsensors	en
dc.subject.other	Magnetic anisotropy constant	en
dc.subject.other	Magneto-surface-acoustic-wave microdevice	en
dc.subject.other	Magnetoelastic coupling coefficient	en
dc.subject.other	Magnetostrictive strain coefficient	en
dc.subject.other	Saturation magnetostriction	en
dc.subject.other	Saturation specific magnetization	en
dc.subject.other	Acoustic surface wave devices	en
dc.title	Magneto-surface-acoustic-waves microdevice using thin film technology: Design and fabrication process	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0924-4247(01)00500-3	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0924-4247(01)00500-3	en
heal.language	English	en
heal.publicationDate	2001	en
heal.abstract	In this paper we describe the design and fabrication process of a magneto-surface-acoustic-waves (MSAWs) microdevice using Fe70B15Si15 amorphous thin films and Fe70B15Si15/SiO2-type multilayers as active media. This simple and small device, able to be used as a sensor or implemented as a part of the magnetomechanical sensing integrated systems, is fabricated using thin film technology combined with photolithographic techniques. In order to use magnetostrictive Fe-metalloid amorphous thin films and (Fe-based magnetostrictive alloy/insulator)(N) multilayers as active media for (MSAWs) microdevices, the magnetic (saturation specific magnetization sigma (s) and magnetic anisotropy constant k(u)) and magnetoelastic (ME)(saturation magnetostriction lambda (s), magnetoelastic coupling coefficient b(gamma ,2), magnetostrictive strain coefficient D and DeltaE/E ratio) properties which determine their performance are studied. The possible use of MSAWs microdevice fabricated by us in microsensors applications is illustrated. (C) 2001 Elsevier Science B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE SA	en
heal.journalName	Sensors and Actuators, A: Physical	en
dc.identifier.doi	10.1016/S0924-4247(01)00500-3	en
dc.identifier.isi	ISI:000168889000026	en
dc.identifier.volume	91	en
dc.identifier.issue	1-2	en
dc.identifier.spage	107	en
dc.identifier.epage	111	en