Ultra-short pulsed laser ablation of polymers

Serafetinides, AA; Makropoulou, MI; Skordoulis, CD; Kar, AK

dc.contributor.author	Serafetinides, AA	en
dc.contributor.author	Makropoulou, MI	en
dc.contributor.author	Skordoulis, CD	en
dc.contributor.author	Kar, AK	en
dc.date.accessioned	2014-03-01T01:17:18Z
dc.date.available	2014-03-01T01:17:18Z
dc.date.issued	2001	en
dc.identifier.issn	0169-4332	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/14439
dc.subject	Picosecond laser ablation	en
dc.subject	Polymer ablation	en
dc.subject	Ultra-short laser ablation	en
dc.subject.classification	Chemistry, Physical	en
dc.subject.classification	Materials Science, Coatings & Films	en
dc.subject.classification	Physics, Applied	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Atomic force microscopy	en
dc.subject.other	Chemical modification	en
dc.subject.other	Infrared radiation	en
dc.subject.other	Laser ablation	en
dc.subject.other	Laser pulses	en
dc.subject.other	Morphology	en
dc.subject.other	Visibility	en
dc.subject.other	Ultrashort pulsed laser ablation	en
dc.subject.other	Organic polymers	en
dc.title	Ultra-short pulsed laser ablation of polymers	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0169-4332(01)00324-5	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0169-4332(01)00324-5	en
heal.language	English	en
heal.publicationDate	2001	en
heal.abstract	We report the experimental results of the ablation rate per pulse as a function of the laser fluence and images of the surface morphology, as examined by atomic force microscopy, for a number of organic polymer materials of special interest in microelectronics and biomedical applications. The ablation parameters and the surface modifications are examined under various irradiation conditions using laser wavelengths ranging from the ultraviolet through the visible to the infrared and pulse widths ranging from nanoseconds to femtoseconds. Our results are discussed in the view of interplay between the material properties and the radiation dependent parameters governing the ablation process. Visible and infrared ultra-short pulsed laser ablation of the polymer samples was performed with a very low threshold fluence of approximately 0.2 mJ/mm(2). The irradiated polymers exhibit different optical transmission properties in the corresponding spectral regions. The quantitative results on ablation rate versus laser energy fluence show that the picosecond laser ablation is more efficient than the subpicosecond and nanosecond ablation, i.e., it exhibits higher etch rates before the onset of any saturation. (C) 2001 Elsevier Science B.V All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	Applied Surface Science	en
dc.identifier.doi	10.1016/S0169-4332(01)00324-5	en
dc.identifier.isi	ISI:000170421500006	en
dc.identifier.volume	180	en
dc.identifier.issue	1-2	en
dc.identifier.spage	42	en
dc.identifier.epage	56	en