Comparison of plasma sprayed and flame sprayed YBa2Cu3O7-x targets for rotatable magnetron sputtering

Van Driessche, I; Georgiopoulos, E; Denul, J; Tsetsekou, A; Andreouli, C; De Roeck, I; De Winter, G; De Gryse, R; Bruneel, E; Hoste, S

dc.contributor.author	Van Driessche, I	en
dc.contributor.author	Georgiopoulos, E	en
dc.contributor.author	Denul, J	en
dc.contributor.author	Tsetsekou, A	en
dc.contributor.author	Andreouli, C	en
dc.contributor.author	De Roeck, I	en
dc.contributor.author	De Winter, G	en
dc.contributor.author	De Gryse, R	en
dc.contributor.author	Bruneel, E	en
dc.contributor.author	Hoste, S	en
dc.date.accessioned	2014-03-01T01:17:39Z
dc.date.available	2014-03-01T01:17:39Z
dc.date.issued	2002	en
dc.identifier.issn	0921-4534	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/14598
dc.subject	Flame spraying	en
dc.subject	Plasma spraying	en
dc.subject	Rotatable magnetron sputter targets	en
dc.subject	YBa2Cu3O7-x	en
dc.subject.classification	Physics, Applied	en
dc.subject.other	Deposition	en
dc.subject.other	Flame spraying	en
dc.subject.other	Magnetron sputtering	en
dc.subject.other	Mechanical properties	en
dc.subject.other	Microstructure	en
dc.subject.other	Plasma spraying	en
dc.subject.other	Stainless steel	en
dc.subject.other	Substrates	en
dc.subject.other	Targets	en
dc.subject.other	Thermodynamic properties	en
dc.subject.other	Rotatable magnetron sputter targets	en
dc.subject.other	Yttrium barium copper oxides	en
dc.title	Comparison of plasma sprayed and flame sprayed YBa2Cu3O7-x targets for rotatable magnetron sputtering	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0921-4534(02)00977-2	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0921-4534(02)00977-2	en
heal.language	English	en
heal.publicationDate	2002	en
heal.abstract	Rotatable magnetron sputter sources are standard equipment in large scale sputter industry for the deposition of metals and metal oxides. The power input in a rotatable magnetron can be much higher compared to a planar magnetron, resulting in improved discharge characteristics and increased deposition speed. In order to develop rotatable magnetron deposition of YBa2Cu3O7-x (YBCO) on an industrial scale, the construction of large cylindrical YBCO targets using plasma and flame spraying was explored. Large cylindrical targets (circle divide 13 cm x 30 cm length) consisting of a stainless steel substrate coated with a 5 mm YBCO coating were fabricated, This paper describes the microstructure, mechanical, structural. thermal and electrical characterisation of the obtained coatings and the characteristics of the targets during magnetron sputtering. (C) 2002 Elsevier Science B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	Physica C: Superconductivity and its Applications	en
dc.identifier.doi	10.1016/S0921-4534(02)00977-2	en
dc.identifier.isi	ISI:000178018800164	en
dc.identifier.volume	372-376	en
dc.identifier.issue	PART 2	en
dc.identifier.spage	1221	en
dc.identifier.epage	1224	en