Angular sensitivities of volume gratings for substrate-mode optical interconnects

Wu, S-D; Gaylord, TK; Glytsis, EN; Wu, Y-M

dc.contributor.author	Wu, S-D	en
dc.contributor.author	Gaylord, TK	en
dc.contributor.author	Glytsis, EN	en
dc.contributor.author	Wu, Y-M	en
dc.date.accessioned	2014-03-01T01:21:51Z
dc.date.available	2014-03-01T01:21:51Z
dc.date.issued	2005	en
dc.identifier.issn	0003-6935	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/16396
dc.subject.classification	Optics	en
dc.subject.other	Gaussian beams	en
dc.subject.other	Gigascale integration (GSI)	en
dc.subject.other	Plane-wave spectrum	en
dc.subject.other	Volume gratings	en
dc.subject.other	Approximation theory	en
dc.subject.other	Harmonic analysis	en
dc.subject.other	Light polarization	en
dc.subject.other	Optical interconnects	en
dc.subject.other	Permittivity	en
dc.subject.other	Printed circuit boards	en
dc.subject.other	Sensitivity analysis	en
dc.subject.other	Diffraction gratings	en
dc.title	Angular sensitivities of volume gratings for substrate-mode optical interconnects	en
heal.type	journalArticle	en
heal.identifier.primary	10.1364/AO.44.004447	en
heal.identifier.secondary	http://dx.doi.org/10.1364/AO.44.004447	en
heal.language	English	en
heal.publicationDate	2005	en
heal.abstract	The angular sensitivities of slanted volume gratings (VGs) illuminated by three-dimensional (3-D) converging-diverging spherical Gaussian beams for substrate-mode optical interconnects in microelectronics are analyzed by application of 3-D finite-beam rigorous coupled-wave analysis. Angular misalignments about the z, y, and x axes that correspond to yaw, pitch, and roll misalignments resulting from manufacturing tolerances of chips are investigated. Two cases of linear polarization of the central beam of the Gaussian are considered: E perpendicular to K and H perpendicular to K, where K is the grating vector. From worst-case manufacturing tolerances, the ranges of yaw, pitch, and roll misalignment angles are alpha = +/- 1.17 degrees, beta = +/- 3.04 degrees, and gamma = +/- 3.04 degrees, respectively. Based on these ranges of misalignment angles, the decreases of diffraction efficiencies for slanted VGs that are due to both the yaw and the roll misalignments are relatively small. However, the efficiency of substrate-mode optical interconnects achieved by slanted VGs could be reduced by 61.04% for E perpendicular to K polarization and by 58.63% for H perpendicular to K polarization because of the pitch misalignment. Thus the performance of a VG optical interconnect is most sensitive to pitch misalignment. (c) 2005 Optical Society of America.	en
heal.publisher	OPTICAL SOC AMER	en
heal.journalName	Applied Optics	en
dc.identifier.doi	10.1364/AO.44.004447	en
dc.identifier.isi	ISI:000230665200003	en
dc.identifier.volume	44	en
dc.identifier.issue	21	en
dc.identifier.spage	4447	en
dc.identifier.epage	4453	en