Influence of pulsed laser deposition (PLD) parameters on the H2 sensing properties of zinc oxide thin films

Brilis, N; Romesis, P; Tsamakis, D; Kompitsas, M

dc.contributor.author	Brilis, N	en
dc.contributor.author	Romesis, P	en
dc.contributor.author	Tsamakis, D	en
dc.contributor.author	Kompitsas, M	en
dc.date.accessioned	2014-03-01T01:22:31Z
dc.date.available	2014-03-01T01:22:31Z
dc.date.issued	2005	en
dc.identifier.issn	0749-6036	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/16599
dc.subject	On-line Control	en
dc.subject	Pulsed Laser Deposition	en
dc.subject	Thin Film	en
dc.subject	Zinc Oxide	en
dc.subject	zno thin film	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Gold	en
dc.subject.other	Nanostructured materials	en
dc.subject.other	Temperature distribution	en
dc.subject.other	Thin films	en
dc.subject.other	Zinc oxide	en
dc.subject.other	Deposition parameters	en
dc.subject.other	Film properties	en
dc.subject.other	Laser parameters	en
dc.subject.other	Pulsed laser deposition	en
dc.title	Influence of pulsed laser deposition (PLD) parameters on the H2 sensing properties of zinc oxide thin films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.spmi.2005.08.003	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.spmi.2005.08.003	en
heal.language	English	en
heal.publicationDate	2005	en
heal.abstract	Thin films of n-type ZnO were produced by a novel two-target, two-pulsed laser deposition technique. This method allows on-line control of the film properties by just changing the laser parameters. A number of deposition parameters, as well as the dopants (Al, Au) and the substrate type (Si, SiO2, glass), were changed. The sensing properties of the films were tested upon exposure to a H-2 flow in air ambient at working temperatures between 150 and 210 degrees C. Undoped ZnO thin films. deposited on SiO2 substrates at 200 degrees C, in ambient O-2 at 20 Pa and with a laser fluence of 9.6 J/cm(3), exhibited a maximum sensitivity (Delta R/R-0) higher than 97% and a response time lower than 3 min at the working temperature 180 degrees C. Decrease of the working temperature to 150 degrees C was achieved by means of surface sensitization of films after deposition of Au nanoclusters on the surface of the above-mentioned ZnO thin films. (C) 2005 Elsevier Ltd. All rights reserved.	en
heal.publisher	ACADEMIC PRESS LTD ELSEVIER SCIENCE LTD	en
heal.journalName	Superlattices and Microstructures	en
dc.identifier.doi	10.1016/j.spmi.2005.08.003	en
dc.identifier.isi	ISI:000233651800008	en
dc.identifier.volume	38	en
dc.identifier.issue	4-6	en
dc.identifier.spage	283	en
dc.identifier.epage	290	en