Simulation of capacitive type bimorph humidity sensors

Fragakis, J; Chatzandroulis, S; Papadimitriou, D; Tsamis, C

dc.contributor.author	Fragakis, J	en
dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Papadimitriou, D	en
dc.contributor.author	Tsamis, C	en
dc.date.accessioned	2014-03-01T01:23:04Z
dc.date.available	2014-03-01T01:23:04Z
dc.date.issued	2005	en
dc.identifier.issn	17426588	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/16797
dc.subject	Humidity Sensor	en
dc.title	Simulation of capacitive type bimorph humidity sensors	en
heal.type	journalArticle	en
heal.identifier.primary	10.1088/1742-6596/10/1/075	en
heal.identifier.secondary	http://dx.doi.org/10.1088/1742-6596/10/1/075	en
heal.publicationDate	2005	en
heal.abstract	FEM modeling of recently developed silicon/polymer bimorph micro-cantilever structures, applied as capacitive type humidity sensors, is presented. In these structures, the expansion of the overlying polymer in the presence of water vapors forces the silicon cantilever to bend resulting in a change of device capacitance. Experimental behavior is approximated by taking into account the stress induced in the cantilever due to the polymer swelling. Simulation results are in good agreement with experimental values. The FEM model developed facilitates the design and optimization of the cantilever beam sensors. © 2005 IOP Publishing Ltd.	en
heal.journalName	Journal of Physics: Conference Series	en
dc.identifier.doi	10.1088/1742-6596/10/1/075	en
dc.identifier.volume	10	en
dc.identifier.issue	1	en
dc.identifier.spage	305	en
dc.identifier.epage	308	en