Correlation of elastic modulus, hardness and density for sputtered TiAlBN thin films

Rebholz, C; Leyland, A; Matthews, A; Charitidis, C; Logothetidis, S; Schneider, D

dc.contributor.author	Rebholz, C	en
dc.contributor.author	Leyland, A	en
dc.contributor.author	Matthews, A	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Schneider, D	en
dc.date.accessioned	2014-03-01T01:23:45Z
dc.date.available	2014-03-01T01:23:45Z
dc.date.issued	2006	en
dc.identifier.issn	0040-6090	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/17127
dc.subject	Elastic properties	en
dc.subject	Hardness	en
dc.subject	Physical vapour deposition (PVD)	en
dc.subject	Sputtering	en
dc.subject.classification	Materials Science, Multidisciplinary	en
dc.subject.classification	Materials Science, Coatings & Films	en
dc.subject.classification	Physics, Applied	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Amorphous films	en
dc.subject.other	Argon	en
dc.subject.other	Elastic moduli	en
dc.subject.other	Hardness	en
dc.subject.other	Magnetron sputtering	en
dc.subject.other	Physical vapor deposition	en
dc.subject.other	Stainless steel	en
dc.subject.other	Thermal effects	en
dc.subject.other	Thin films	en
dc.subject.other	AISI 316 stainless steel	en
dc.subject.other	Elastic properties	en
dc.subject.other	Film density	en
dc.subject.other	Reactive magnetron sputtering	en
dc.subject.other	Titanium compounds	en
dc.title	Correlation of elastic modulus, hardness and density for sputtered TiAlBN thin films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.tsf.2006.02.038	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.tsf.2006.02.038	en
heal.language	English	en
heal.publicationDate	2006	en
heal.abstract	This paper describes the correlation between the elastic modulus, hardness and density of mainly X-ray amorphous TiAlxByNz (0.29 <= x <= 1.32; 1.15 <= y <= 2.07, 0.37 <= z <= 2.19) films, deposited by simultaneous reactive magnetron sputtering from TiAl and TiB, targets onto AISI 316 stainless steel and Si(100) substrates in Ar/N-2 mixtures at 150 degrees C. The elastic modulus, hardness and density were found to depend on chemical composition and the phases present, and an approximately linear correlation between elastic modulus and hardness could be established. The elastic modulus and hardness were also found to be a function of film density, except in films containing significant amounts of BN. (c) 2006 Elsevier B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE SA	en
heal.journalName	Thin Solid Films	en
dc.identifier.doi	10.1016/j.tsf.2006.02.038	en
dc.identifier.isi	ISI:000239218400012	en
dc.identifier.volume	514	en
dc.identifier.issue	1-2	en
dc.identifier.spage	81	en
dc.identifier.epage	86	en