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Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films

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dc.contributor.author Vourdas, N en
dc.contributor.author Karadimos, G en
dc.contributor.author Goustouridis, D en
dc.contributor.author Gogolides, E en
dc.contributor.author Boudouvis, AG en
dc.contributor.author Tortai, J-H en
dc.contributor.author Beltsios, K en
dc.contributor.author Raptis, I en
dc.date.accessioned 2014-03-01T01:24:41Z
dc.date.available 2014-03-01T01:24:41Z
dc.date.issued 2006 en
dc.identifier.issn 0021-8995 en
dc.identifier.uri http://hdl.handle.net/123456789/17399
dc.subject Coefficient of thermal expansion en
dc.subject Glass transition en
dc.subject Interferometry en
dc.subject Lithography en
dc.subject Poly(methyl methacrylate) en
dc.subject Spectroscopic ellipsometry en
dc.subject Thin polymeric films en
dc.subject.classification Polymer Science en
dc.subject.other Ellipsometry en
dc.subject.other Glass transition en
dc.subject.other Interferometry en
dc.subject.other Lithography en
dc.subject.other Molecular weight en
dc.subject.other Plastic films en
dc.subject.other Coefficient of thermal expansion en
dc.subject.other Single-wavelength interferometry en
dc.subject.other Spectroscopic ellipsometry en
dc.subject.other Thin polymeric films en
dc.subject.other Thin films en
dc.subject.other film en
dc.subject.other glass transition temperature en
dc.subject.other molecular weight en
dc.subject.other optical property en
dc.subject.other polymethyl methacrylate en
dc.subject.other thermal expansion en
dc.subject.other thermal property en
dc.title Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films en
heal.type journalArticle en
heal.identifier.primary 10.1002/app.25107 en
heal.identifier.secondary http://dx.doi.org/10.1002/app.25107 en
heal.language English en
heal.publicationDate 2006 en
heal.abstract Multiple-wavelength interferometry (MWI), a new optical method for the thermal probing of thin polymer films, is introduced and explored. MWI is compared with two standard optical methods, single-wavelength interferometry and spectroscopic ellipsometry, with regard to the detection of the glass transition temperature (T-g) of thin supported polymer films. Poly(methyl methacrylate) films are deposited by spin coating on Si and SiO2 substrates. MWI is also applied to the study of the effect of film thickness (25-600 nm) and polymer molecular weight (1.5 x 10(4) to 10(6)) on T-g, the effect of film thickness on the coefficients of thermal expansion both below and above T-g, and the effect of deep UV exposure time on the thermal properties (glass transition and degradation temperatures) of the films. This further exploration of the MWI method provides substantial insights about intricate issues pertinent to the thermal behavior of thin polymer films. (c) 2006 Wiley Periodicals, Inc. en
heal.publisher JOHN WILEY & SONS INC en
heal.journalName Journal of Applied Polymer Science en
dc.identifier.doi 10.1002/app.25107 en
dc.identifier.isi ISI:000241593700091 en
dc.identifier.volume 102 en
dc.identifier.issue 5 en
dc.identifier.spage 4764 en
dc.identifier.epage 4774 en


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