New monolithic three dimensional field sensors with high sensitivity

Hristoforou, E

dc.contributor.author	Hristoforou, E	en
dc.date.accessioned	2014-03-01T01:24:44Z
dc.date.available	2014-03-01T01:24:44Z
dc.date.issued	2006	en
dc.identifier.issn	1454-4164	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/17411
dc.relation.uri	http://www.scopus.com/inward/record.url?eid=2-s2.0-33750584542&partnerID=40&md5=e47c61f9a95f8cd61395f9fc59578aa9	en
dc.relation.uri	http://inoe.inoe.ro/joam/arhiva/pdf8_5/5Hristoforou.pdf	en
dc.subject	Induction	en
dc.subject	Magnetometry	en
dc.subject	Magnetoresistance	en
dc.subject.classification	Materials Science, Multidisciplinary	en
dc.subject.classification	Optics	en
dc.subject.classification	Physics, Applied	en
dc.subject.other	AMORPHOUS WIRES	en
dc.subject.other	FLUXGATE SENSOR	en
dc.subject.other	SPIN-VALVE	en
dc.subject.other	THIN-FILM	en
dc.subject.other	GMR	en
dc.subject.other	MAGNETOIMPEDANCE	en
dc.subject.other	AMR	en
dc.subject.other	TECHNOLOGIES	en
dc.subject.other	OPTIMIZATION	en
dc.subject.other	MULTILAYERS	en
dc.title	New monolithic three dimensional field sensors with high sensitivity	en
heal.type	journalArticle	en
heal.language	English	en
heal.publicationDate	2006	en
heal.abstract	In this paper, a new family of field sensors is presented, able to be integrated into a single integrated circuit, illustrating quite high sensitivity and accuracy. These sensors are based on the inductive or galvanic response of soft magnetic thin films or ribbons as sensing elements, subjected to on-plane or out-of-plane rotation of magnetization. The sensing cores are magnetized by rotating field on their surface, with amplitude significantly larger than the anisotropy field of the thin film or ribbon. Thus, they illustrate pseudo-super-paramagnetic behavior by means of circular magnetization, exhibiting no discontinuities on the magnetization rotation and therefore no magnetic noise due to absence of Barkhausen jumps. The two on plane under measurement field components may be determined by the modulation of the rotating field response, by means of phase shift and amplitude modulation of the second harmonic. Such phase shift and amplitude modulation is measured either by inductive means like on-chip Hall elements, or by galvanic techniques using on-chip VIAS connections. Absence of Barkhausen noise can result in sensitivity of the order of pT of the galvanic mode of operation, while use of Hall effect devices resulted in a sensitivity of the order of nT. These sensors may serve as single chip gyroscopes and electronic compasses for various applications like mobile telecommunications, driverless driving and precise GPS systems.	en
heal.publisher	NATL INST OPTOELECTRONICS	en
heal.journalName	Journal of Optoelectronics and Advanced Materials	en
dc.identifier.isi	ISI:000241473000008	en
dc.identifier.volume	8	en
dc.identifier.issue	5	en
dc.identifier.spage	1691	en
dc.identifier.epage	1697	en