Ultraviolet laser microstructuring of silicon and the effect of laser pulse duration on the surface morphology

Skantzakis, E; Zorba, V; Papazoglou, DG; Zergioti, I; Fotakis, C

dc.contributor.author	Skantzakis, E	en
dc.contributor.author	Zorba, V	en
dc.contributor.author	Papazoglou, DG	en
dc.contributor.author	Zergioti, I	en
dc.contributor.author	Fotakis, C	en
dc.date.accessioned	2014-03-01T01:25:27Z
dc.date.available	2014-03-01T01:25:27Z
dc.date.issued	2006	en
dc.identifier.issn	0169-4332	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/17669
dc.subject	Laser materials processing	en
dc.subject	Silicon microcones	en
dc.subject.classification	Chemistry, Physical	en
dc.subject.classification	Materials Science, Coatings & Films	en
dc.subject.classification	Physics, Applied	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Imaging techniques	en
dc.subject.other	Laser beam effects	en
dc.subject.other	Microstructure	en
dc.subject.other	Morphology	en
dc.subject.other	Parameter estimation	en
dc.subject.other	Scanning electron microscopy	en
dc.subject.other	Ultraviolet radiation	en
dc.subject.other	Laser materials processing	en
dc.subject.other	Silicon microcones	en
dc.subject.other	Silicon	en
dc.title	Ultraviolet laser microstructuring of silicon and the effect of laser pulse duration on the surface morphology	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.apsusc.2005.07.120	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.apsusc.2005.07.120	en
heal.language	English	en
heal.publicationDate	2006	en
heal.abstract	The study of the laser pulse duration effect on the silicon micro-spikes morphology is presented. The microcones were produced by ultraviolet (248 nm) laser irradiation of doped Si wafers in SF6 environment. The laser pulse duration was adjusted at 450 fs, 5 ps and 15 ns. We have analyzed the statistical nature of the spikes' morphological characteristics, such as periodicity and apex angle by exploiting image processing techniques, on SEM images of the irradiated samples. The correlation of the quantitative morphological characteristics with the laser parameters (pulse duration, laser fluence and number of pulses) provides new insight on the physical mechanisms, which are involved on the formation of Si microcones. (c) 2005 Elsevier B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	Applied Surface Science	en
dc.identifier.doi	10.1016/j.apsusc.2005.07.120	en
dc.identifier.isi	ISI:000238623200023	en
dc.identifier.volume	252	en
dc.identifier.issue	13 SPEC. ISS.	en
dc.identifier.spage	4462	en
dc.identifier.epage	4466	en