Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties

Zorba, V; Boukos, N; Zergioti, I; Fotakis, C

dc.contributor.author	Zorba, V	en
dc.contributor.author	Boukos, N	en
dc.contributor.author	Zergioti, I	en
dc.contributor.author	Fotakis, C	en
dc.date.accessioned	2014-03-01T01:29:26Z
dc.date.available	2014-03-01T01:29:26Z
dc.date.issued	2008	en
dc.identifier.issn	0003-6935	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/19260
dc.subject	Microstructures	en
dc.subject	Optical Properties	en
dc.subject	Ultraviolet	en
dc.subject.classification	Optics	en
dc.subject.other	Absorptance	en
dc.subject.other	Amorphous si	en
dc.subject.other	Band gaps	en
dc.subject.other	Crystallinity	en
dc.subject.other	Femtosecond	en
dc.subject.other	Laser pulse durations	en
dc.subject.other	Microcones	en
dc.subject.other	Nano-crystalline Si	en
dc.subject.other	Nanosecond lasers	en
dc.subject.other	Picosecond	en
dc.subject.other	Self-organized	en
dc.subject.other	Si-based photodetectors	en
dc.subject.other	Single-crystalline	en
dc.subject.other	Spectral response	en
dc.subject.other	Structural and optical properties	en
dc.subject.other	Laser pulses	en
dc.subject.other	Lasers	en
dc.subject.other	Optical properties	en
dc.subject.other	Optoelectronic devices	en
dc.subject.other	Photolithography	en
dc.subject.other	Pulse generators	en
dc.subject.other	Pulsed laser applications	en
dc.subject.other	Silicon	en
dc.subject.other	Sulfur	en
dc.subject.other	Amorphous silicon	en
dc.title	Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties	en
heal.type	journalArticle	en
heal.identifier.primary	10.1364/AO.47.001846	en
heal.identifier.secondary	http://dx.doi.org/10.1364/AO.47.001846	en
heal.language	English	en
heal.publicationDate	2008	en
heal.abstract	The effect of laser pulse duration on the morphology, composition, crystallinity and optical properties of self-organized Si microcones fabricated using 248 nm laser pulses (500 fs, 5 ps and 15 ns) in an SF6 atmosphere, is presented in this paper. Despite distinct differences in the morphology, the Si cones show similar structure and composition independently of the laser pulse duration used: a core of single-crystalline Si, covered by a few hundred nanometer thick, sulfur-doped nanocrystalline Si layer, where no amorphous Si is present. The obtained features exhibit strong below-bandgap, absorptance, making them excellent candidates for Si based photodetectors with improved spectral response. (c) 2008 Optical Society of America.	en
heal.publisher	OPTICAL SOC AMER	en
heal.journalName	Applied Optics	en
dc.identifier.doi	10.1364/AO.47.001846	en
dc.identifier.isi	ISI:000255492100020	en
dc.identifier.volume	47	en
dc.identifier.issue	11	en
dc.identifier.spage	1846	en
dc.identifier.epage	1850	en