Nanomechanical and nanotribological properties of carbon-based thin films: A review

Charitidis, CA

dc.contributor.author	Charitidis, CA	en
dc.date.accessioned	2014-03-01T01:33:48Z
dc.date.available	2014-03-01T01:33:48Z
dc.date.issued	2010	en
dc.identifier.issn	0263-4368	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/20606
dc.subject	Amorphous carbon films	en
dc.subject	Friction	en
dc.subject	Nanocomposites	en
dc.subject	Nanoindentation	en
dc.subject	Nanotribology	en
dc.subject.classification	Materials Science, Multidisciplinary	en
dc.subject.classification	Metallurgy & Metallurgical Engineering	en
dc.subject.other	a-C film	en
dc.subject.other	Carbon-based	en
dc.subject.other	Critical variables	en
dc.subject.other	Deformation response	en
dc.subject.other	H-content	en
dc.subject.other	High hardness	en
dc.subject.other	Hydrogenated amorphous carbon (a-C:H)	en
dc.subject.other	Low load	en
dc.subject.other	Nanomechanical property	en
dc.subject.other	Nanoscratching	en
dc.subject.other	Nanotribological properties	en
dc.subject.other	Quantitative analysis	en
dc.subject.other	Tribological performance	en
dc.subject.other	Amorphous carbon	en
dc.subject.other	Amorphous films	en
dc.subject.other	Amorphous silicon	en
dc.subject.other	Chemical reactions	en
dc.subject.other	Chemical resistance	en
dc.subject.other	Composite coatings	en
dc.subject.other	Composite films	en
dc.subject.other	Friction	en
dc.subject.other	Nanocomposites	en
dc.subject.other	Nanoindentation	en
dc.subject.other	Nanotribology	en
dc.subject.other	Nitrides	en
dc.subject.other	Thin films	en
dc.subject.other	Wear resistance	en
dc.subject.other	Carbon films	en
dc.title	Nanomechanical and nanotribological properties of carbon-based thin films: A review	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.ijrmhm.2009.08.003	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.ijrmhm.2009.08.003	en
heal.language	English	en
heal.publicationDate	2010	en
heal.abstract	Carbon-based thin films possess unique and adjustable combination of properties such as high hardness and wear resistance, chemical resistance and good tribological performances. Among critical variables to tailor a-C film's properties for specific application is the distribution of the carbon hybridization states (sp(1), sp(2) and sp(3) bonds), the atomic H content, the content in dopants such as Si, F, N, B and O. Here we focus on: (i) a-C and hydrogenated amorphous carbon (a-C:H) films with a mixture of sp(2) and sp(3) bonding, highly sp(3)-boned material (ta-C) and sp(2)-bonded carbon, (ii) carbon nitride (CNx) coatings and (iii) metal/amorphous carbon (a-C:M) composite films. The study is focused on the review of the nanomechanical properties and analysis of the nanoscratching processes at low loads to obtain quantitative analysis, the comparison of their elastic/plastic deformation response, and nanotribological behavior of the a-C, ta-C, a-C:H, CNx, and a-C:M films. For ta-C and a-C:M films new data are presented and discussed. (C) 2009 Elsevier Ltd. All rights reserved.	en
heal.publisher	ELSEVIER SCI LTD	en
heal.journalName	International Journal of Refractory Metals and Hard Materials	en
dc.identifier.doi	10.1016/j.ijrmhm.2009.08.003	en
dc.identifier.isi	ISI:000272096400007	en
dc.identifier.volume	28	en
dc.identifier.issue	1	en
dc.identifier.spage	51	en
dc.identifier.epage	70	en