Laser energy density, structure and properties of pulsed-laser deposited zinc oxide films

Tsoutsouva, MG; Panagopoulos, CN; Kompitsas, M

dc.contributor.author	Tsoutsouva, MG	en
dc.contributor.author	Panagopoulos, CN	en
dc.contributor.author	Kompitsas, M	en
dc.date.accessioned	2014-03-01T01:35:55Z
dc.date.available	2014-03-01T01:35:55Z
dc.date.issued	2011	en
dc.identifier.issn	0169-4332	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/21248
dc.subject	Laser energy density dependence	en
dc.subject	Nanosecond pulsed laser deposition	en
dc.subject	Optical and electrical properties	en
dc.subject	Structural	en
dc.subject	ZnO films	en
dc.subject.classification	Chemistry, Physical	en
dc.subject.classification	Materials Science, Coatings & Films	en
dc.subject.classification	Physics, Applied	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Laser energy density	en
dc.subject.other	Nanosecond pulsed laser deposition	en
dc.subject.other	Optical and electrical properties	en
dc.subject.other	Structural	en
dc.subject.other	ZnO films	en
dc.subject.other	Atomic spectroscopy	en
dc.subject.other	Deposition	en
dc.subject.other	Electric conductivity	en
dc.subject.other	Excimer lasers	en
dc.subject.other	Gas lasers	en
dc.subject.other	Glass lasers	en
dc.subject.other	Krypton	en
dc.subject.other	Metallic films	en
dc.subject.other	Optical properties	en
dc.subject.other	Oxide films	en
dc.subject.other	Oxygen	en
dc.subject.other	Pulsed laser deposition	en
dc.subject.other	Structural properties	en
dc.subject.other	Substrates	en
dc.subject.other	Surface roughness	en
dc.subject.other	Ultrafast lasers	en
dc.subject.other	X ray diffraction	en
dc.subject.other	Zinc	en
dc.subject.other	Zinc oxide	en
dc.subject.other	Pulsed lasers	en
dc.title	Laser energy density, structure and properties of pulsed-laser deposited zinc oxide films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.apsusc.2011.02.073	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.apsusc.2011.02.073	en
heal.language	English	en
heal.publicationDate	2011	en
heal.abstract	Zinc oxide thin films were deposited on soda lime glass substrates by pulsed laser deposition in an oxygen-reactive atmosphere at 20 Pa and a constant substrate temperature at 300 degrees C. A pulsed KrF excimer laser, operated at 248nm with pulse duration 10 ns, was used to ablate the ceramic zinc oxide target. The structure, the optical and electrical properties of the as-deposited films were studied in dependence of the laser energy density in the 1.2-2.8J/cm(2) range, with the aid of X-ray Diffraction, Atomic Force Microscope, Transmission Spectroscopy techniques, and the Van der Pauw method, respectively. The results indicated that the structural and optical properties of the zinc oxide films were improved by increasing the laser energy density of the ablating laser. The surface roughness of the zinc oxide film increased with the decrease of laser energy density and both the optical bang gap and the electrical resistivity of the film were significantly affected by the laser energy density. (C) 2011 Elsevier B. V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	Applied Surface Science	en
dc.identifier.doi	10.1016/j.apsusc.2011.02.073	en
dc.identifier.isi	ISI:000288646900065	en
dc.identifier.volume	257	en
dc.identifier.issue	14	en
dc.identifier.spage	6314	en
dc.identifier.epage	6319	en