ZnO thin films prepared by pulsed laser deposition

Tsoutsouva, MG; Panagopoulos, CN; Papadimitriou, D; Fasaki, I; Kompitsas, M

dc.contributor.author	Tsoutsouva, MG	en
dc.contributor.author	Panagopoulos, CN	en
dc.contributor.author	Papadimitriou, D	en
dc.contributor.author	Fasaki, I	en
dc.contributor.author	Kompitsas, M	en
dc.date.accessioned	2014-03-01T01:37:34Z
dc.date.available	2014-03-01T01:37:34Z
dc.date.issued	2011	en
dc.identifier.issn	0921-5107	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/21557
dc.subject	Electrical properties	en
dc.subject	Optical	en
dc.subject	Pulsed laser deposition	en
dc.subject	Structural	en
dc.subject	Zinc oxide thin films	en
dc.subject.classification	Materials Science, Multidisciplinary	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Electrical measurement	en
dc.subject.other	Electrical property	en
dc.subject.other	Energy bandgaps	en
dc.subject.other	Film resistivity	en
dc.subject.other	Hexagonal wurtzite structure	en
dc.subject.other	High quality	en
dc.subject.other	High transmittance	en
dc.subject.other	Optical	en
dc.subject.other	Oxygen pressure	en
dc.subject.other	Polycrystalline ZnO	en
dc.subject.other	Reactive atmospheres	en
dc.subject.other	RMS roughness	en
dc.subject.other	Soda lime glass substrate	en
dc.subject.other	Structural	en
dc.subject.other	Substrate temperature	en
dc.subject.other	Zinc oxide thin films	en
dc.subject.other	ZnO	en
dc.subject.other	ZnO films	en
dc.subject.other	ZnO thin film	en
dc.subject.other	Deposition	en
dc.subject.other	Electric properties	en
dc.subject.other	Film preparation	en
dc.subject.other	Glass lasers	en
dc.subject.other	Metallic films	en
dc.subject.other	Optical properties	en
dc.subject.other	Oxygen	en
dc.subject.other	Pulsed laser deposition	en
dc.subject.other	Pulsed lasers	en
dc.subject.other	Substrates	en
dc.subject.other	Thin films	en
dc.subject.other	Vapor deposition	en
dc.subject.other	Zinc	en
dc.subject.other	Zinc oxide	en
dc.subject.other	Zinc sulfide	en
dc.subject.other	Oxide films	en
dc.title	ZnO thin films prepared by pulsed laser deposition	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.mseb.2010.03.059	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.mseb.2010.03.059	en
heal.language	English	en
heal.publicationDate	2011	en
heal.abstract	Zinc oxide (ZnO) thin films were deposited on soda lime glass substrates by pulsed laser deposition (PLD) in an oxygen-reactive atmosphere. The structural, optical, and electrical properties of the as-prepared thin films were studied in dependence of substrate temperature and oxygen pressure. High quality poly-crystalline ZnO films with hexagonal wurtzite structure were deposited at substrate temperatures of 100 and 300 degrees C. The RMS roughness of the deposited oxide films was found to be in the range 2-9 nm and was only slightly dependent on substrate temperature and oxygen pressure. Electrical measurements indicated a decrease of film resistivity with the increase of substrate temperature and the decrease of oxygen pressure. The ZnO films exhibited high transmittance of 90% and their energy band gap and thickness were in the range 3.26-3.30 eV and 256-627 nm, respectively. (C) 2010 Elsevier B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	Materials Science and Engineering B: Solid-State Materials for Advanced Technology	en
dc.identifier.doi	10.1016/j.mseb.2010.03.059	en
dc.identifier.isi	ISI:000289920600005	en
dc.identifier.volume	176	en
dc.identifier.issue	6	en
dc.identifier.spage	480	en
dc.identifier.epage	483	en