Biaxial strains on thin silicon wafers

Liarokapis, E; Richter, W

dc.contributor.author	Liarokapis, E	en
dc.contributor.author	Richter, W	en
dc.date.accessioned	2014-03-01T01:41:03Z
dc.date.available	2014-03-01T01:41:03Z
dc.date.issued	1992	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/23336
dc.subject	Silicon Wafer	en
dc.title	Biaxial strains on thin silicon wafers	en
heal.type	journalArticle	en
heal.identifier.primary	10.1080/08957959208201450	en
heal.identifier.secondary	http://dx.doi.org/10.1080/08957959208201450	en
heal.publicationDate	1992	en
heal.journalName	High Pressure Research	en
dc.identifier.doi	10.1080/08957959208201450	en