Deposition of refractory coatings by LCVD

Zergioti, I; Zervaki, A; Hatziapostolou, A; Haidemenopoulos, G; Hontzopoulos, E

dc.contributor.author	Zergioti, I	en
dc.contributor.author	Zervaki, A	en
dc.contributor.author	Hatziapostolou, A	en
dc.contributor.author	Haidemenopoulos, G	en
dc.contributor.author	Hontzopoulos, E	en
dc.date.accessioned	2014-03-01T01:43:06Z
dc.date.available	2014-03-01T01:43:06Z
dc.date.issued	1995	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/24040
dc.subject	Chemical Vapour Deposited	en
dc.subject	co2 laser	en
dc.subject	Excimer Laser	en
dc.subject	Feedback Loop	en
dc.subject	Low Power	en
dc.subject	Surface Temperature	en
dc.title	Deposition of refractory coatings by LCVD	en
heal.type	journalArticle	en
heal.identifier.primary	10.1007/BF00326489	en
heal.identifier.secondary	http://dx.doi.org/10.1007/BF00326489	en
heal.publicationDate	1995	en
heal.abstract	TiC layers have been successfully deposited locally on tool steel specimens and real small industrial tools in order to improve their mechanical and corrosion properties. TiC films have been produced by the pyrolytic laser chemical vapour deposition technique, using a low power RF-modulated CO2 laser and a gas mixture of TiCl4/CCl4/H2/H/Ar. The surface temperature was monitored by a microcomputer-based feedback	en
dc.identifier.doi	10.1007/BF00326489	en