Pyrolytic laser-based chemical vapour deposition of TIC coatings

Zergioti, I; Hatziapostolou, A; Hontzopoulos, E; Zervaki, A; Haidemenopoulos, G

dc.contributor.author	Zergioti, I	en
dc.contributor.author	Hatziapostolou, A	en
dc.contributor.author	Hontzopoulos, E	en
dc.contributor.author	Zervaki, A	en
dc.contributor.author	Haidemenopoulos, G	en
dc.date.accessioned	2014-03-01T01:43:25Z
dc.date.available	2014-03-01T01:43:25Z
dc.date.issued	1995	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/24116
dc.subject	Chemical Reaction	en
dc.subject	Chemical Vapour Deposited	en
dc.subject	co2 laser	en
dc.subject	Feedback Loop	en
dc.subject	Scanning Electron Microscopy	en
dc.subject	Source Localization	en
dc.subject	Surface Properties	en
dc.subject	Titanium Carbide	en
dc.subject	Transmission Electron Microscopy	en
dc.subject	X Ray Diffraction	en
dc.subject	Energy Dispersive X Ray	en
dc.title	Pyrolytic laser-based chemical vapour deposition of TIC coatings	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/0040-6090(95)06906-2	en
heal.identifier.secondary	http://dx.doi.org/10.1016/0040-6090(95)06906-2	en
heal.publicationDate	1995	en
heal.abstract	TiC layers have been successfully deposited locally on D2 tool steel specimens and miniature industrial tools with the aim to improve their mechanical and chemical surface properties. The deposition process was based on a pyrolytically-induced chemical reaction of TiCl4 and CCl4 compounds combined with an atomic hydrogen source. Local heating of the substrate was achieved by means of a 100	en
heal.journalName	Thin Solid Films	en
dc.identifier.doi	10.1016/0040-6090(95)06906-2	en