A solid-state pressure-sensing microsystem for biomedical applications

Chatzandroulis, S; Goustouridis, D; Normand, P; Tsoukalas, D

dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Normand, P	en
dc.contributor.author	Tsoukalas, D	en
dc.date.accessioned	2014-03-01T01:45:30Z
dc.date.available	2014-03-01T01:45:30Z
dc.date.issued	1997	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/24602
dc.subject	Age Effect	en
dc.subject	Biomedical Application	en
dc.subject	Integrated Circuit	en
dc.subject	Pressure Sensor	en
dc.subject	Temperature Dependence	en
dc.title	A solid-state pressure-sensing microsystem for biomedical applications	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0924-4247(97)01567-7	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0924-4247(97)01567-7	en
heal.publicationDate	1997	en
heal.abstract	A pressure-sensing system consisting of a miniature silicon capacitive-type sensor, made with the silicon fusion bonding technique, and a detection integrated circuit is presented. The entire system converts pressure changes, in the pressure range useful for biomedical applications, to frequency changes. The system is equipped with a reference capacitor to cancel out the temperature dependence and the ageing effects.	en
heal.journalName	Sensors and Actuators A-physical	en
dc.identifier.doi	10.1016/S0924-4247(97)01567-7	en