Design and fabrication of mirominiature delay line using thin film technology

Chiriac, H; Hristoforou, E; Grigorica, M; Moga, A

dc.contributor.author	Chiriac, H	en
dc.contributor.author	Hristoforou, E	en
dc.contributor.author	Grigorica, M	en
dc.contributor.author	Moga, A	en
dc.date.accessioned	2014-03-01T01:45:34Z
dc.date.available	2014-03-01T01:45:34Z
dc.date.issued	1997	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/24631
dc.subject	Amorphous Thin Films	en
dc.subject	Thin Film	en
dc.title	Design and fabrication of mirominiature delay line using thin film technology	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0924-4247(97)80190-2	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0924-4247(97)80190-2	en
heal.publicationDate	1997	en
heal.abstract	This paper describes the fabrication of a miniaturized magnetostrictive delay line thin film. A monolithic design has been achieved with the coils and the magnetoelastic element contained onto the same silicon substrate. Such a miniaturized device able to be used as a sensor was fabricated by using a multilayer-like technique. The exciting conductor, the receiving coil and the magnetostrictive delay	en
heal.journalName	Sensors and Actuators A-physical	en
dc.identifier.doi	10.1016/S0924-4247(97)80190-2	en