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Chemical sensing using nonoptical microelectromechanical systems
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| dc.contributor.author | Freidhoff, C | en |
| dc.contributor.author | Young, R | en |
| dc.contributor.author | Sriram, S | en |
| dc.contributor.author | Braggins, T | en |
| dc.contributor.author | O'Keefe, T | en |
| dc.contributor.author | Adam, J | en |
| dc.contributor.author | Nathanson, H | en |
| dc.contributor.author | Syms, R | en |
| dc.contributor.author | Tate, T | en |
| dc.contributor.author | Ahmad, M | en |
| dc.contributor.author | Taylor, S | en |
| dc.contributor.author | Tunstall, J | en |
| dc.date.accessioned | 2014-03-01T01:47:49Z | |
| dc.date.available | 2014-03-01T01:47:49Z | |
| dc.date.issued | 1999 | en |
| dc.identifier.uri | https://dspace.lib.ntua.gr/xmlui/handle/123456789/25348 | |
| dc.subject | microelectromechanical system | en |
| dc.title | Chemical sensing using nonoptical microelectromechanical systems | en |
| heal.type | journalArticle | en |
| heal.identifier.primary | 10.1116/1.581764 | en |
| heal.identifier.secondary | http://dx.doi.org/10.1116/1.581764 | en |
| heal.publicationDate | 1999 | en |
| heal.journalName | Journal of Vacuum Science & Technology A | en |
| dc.identifier.doi | 10.1116/1.581764 | en |
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