Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon–carbon bonding

Logothetidis, S; Charitidis, C

dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Charitidis, C	en
dc.date.accessioned	2014-03-01T01:47:54Z
dc.date.available	2014-03-01T01:47:54Z
dc.date.issued	1999	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/25366
dc.subject	Amorphous Carbon	en
dc.subject	Elastic Modulus	en
dc.subject	Elastic Properties	en
dc.subject	Ion Bombardment	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Thin Film	en
dc.title	Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon–carbon bonding	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0040-6090(99)00425-3	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0040-6090(99)00425-3	en
heal.publicationDate	1999	en
heal.abstract	The hardness and elastic modulus of thin, free of hydrogen, amorphous carbon (a-C) films, deposited with sputtering, were measured using the nanoindentation, conventional and continuous stiffness measurements (CSM), depth-sensing techniques. It is shown that the CSM technique is quite efficient in characterizing very thin (∼30 nm) a-C films. The sp2 and sp3 content and thickness of a-C films were determined	en
heal.journalName	Thin Solid Films	en
dc.identifier.doi	10.1016/S0040-6090(99)00425-3	en