Microprinting and microetching of diffractive structures using ultrashort laser pulses

Zergioti, I; Mailis, S; Vainos, N; Ikiades, A; Grigoropoulos, C; Fotakis, C

dc.contributor.author	Zergioti, I	en
dc.contributor.author	Mailis, S	en
dc.contributor.author	Vainos, N	en
dc.contributor.author	Ikiades, A	en
dc.contributor.author	Grigoropoulos, C	en
dc.contributor.author	Fotakis, C	en
dc.date.accessioned	2014-03-01T01:48:10Z
dc.date.available	2014-03-01T01:48:10Z
dc.date.issued	1999	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/25412
dc.subject	Excimer Laser	en
dc.subject	Microstructures	en
dc.subject	Optical Fibre	en
dc.subject	Thermal Diffusion	en
dc.subject	Ultrashort Laser Pulse	en
dc.subject	Ultraviolet	en
dc.subject	High Definition	en
dc.title	Microprinting and microetching of diffractive structures using ultrashort laser pulses	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0169-4332(98)00526-1	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0169-4332(98)00526-1	en
heal.publicationDate	1999	en
heal.abstract	Two complementary methods, the microetching and the microdeposition, of materials using ultrashort pulses of ultraviolet (UV) laser radiation for the fabrication of diffractive structures are presented. Microetching of various solid materials (polymers, metals) using femtosecond excimer lasers produces high definition micron diffractive patterns. The microdeposition method utilizes the selective microablation and transfer of thin metallic films for achieving microstructures of	en
heal.journalName	Applied Surface Science	en
dc.identifier.doi	10.1016/S0169-4332(98)00526-1	en