Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films

Logothetidis, S; Gioti, M; Charitidis, C; Patsalas, P; Arvanitidis, J; Stoemenos, J

dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Gioti, M	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Patsalas, P	en
dc.contributor.author	Arvanitidis, J	en
dc.contributor.author	Stoemenos, J	en
dc.date.accessioned	2014-03-01T01:48:21Z
dc.date.available	2014-03-01T01:48:21Z
dc.date.issued	1999	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/25461
dc.subject	Amorphous Carbon	en
dc.subject	Elastic Modulus	en
dc.subject	Elastic Properties	en
dc.subject	Layered Structure	en
dc.subject	Raman Spectra	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Transmission Electron Microscopy	en
dc.title	Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0169-4332(98)00401-2	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0169-4332(98)00401-2	en
heal.publicationDate	1999	en
heal.abstract	The growth of sputtered amorphous carbon (a-C) films in layer structure with alternating (negative/positive) substrate bias voltage Vb, was applied to control their intrinsic stress level and stability. The main benefit of the process was the development of thick, stable, hard and rich in sp3 sites films proving their usefulness for many practical applications. In order to investigate the structure	en
heal.journalName	Applied Surface Science	en
dc.identifier.doi	10.1016/S0169-4332(98)00401-2	en