Comprehensive study on the properties of multilayered amorphous carbon films

Logothetidis, S; Charitidis, C; Gioti, M; Panayiotatos, Y; Handrea, M; Kautek, W

dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Gioti, M	en
dc.contributor.author	Panayiotatos, Y	en
dc.contributor.author	Handrea, M	en
dc.contributor.author	Kautek, W	en
dc.date.accessioned	2014-03-01T01:49:19Z
dc.date.available	2014-03-01T01:49:19Z
dc.date.issued	2000	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/25716
dc.subject	Amorphous Carbon	en
dc.subject	Elastic Properties	en
dc.subject	Magnetron Sputtering	en
dc.subject	Mechanical Property	en
dc.subject	Photoelectron Spectroscopy	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Thick Film	en
dc.subject	X Ray Photoelectron Spectroscopy	en
dc.title	Comprehensive study on the properties of multilayered amorphous carbon films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0925-9635(99)00289-7	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0925-9635(99)00289-7	en
heal.publicationDate	2000	en
heal.abstract	Amorphous carbon (a-C) multilayered films consisting of sequential layers rich in sp2 (A) and sp3 (B) content have been developed by magnetron sputtering. We study here the effect of thickness d of the A layer in developing stable thick films with controllable stress and elastic properties. In situ spectroscopic ellipsometry is used to calculate the thickness and the composition of	en
heal.journalName	Diamond and Related Materials	en
dc.identifier.doi	10.1016/S0925-9635(99)00289-7	en