Characterization of optical UV filters using Rutherford backscattering spectroscopy

Vlastou, R; Fokitis, E; Maltezos, S; Kalliabakos, G; Kokkoris, M; Kossionides, E

dc.contributor.author	Vlastou, R	en
dc.contributor.author	Fokitis, E	en
dc.contributor.author	Maltezos, S	en
dc.contributor.author	Kalliabakos, G	en
dc.contributor.author	Kokkoris, M	en
dc.contributor.author	Kossionides, E	en
dc.date.accessioned	2014-03-01T01:49:46Z
dc.date.available	2014-03-01T01:49:46Z
dc.date.issued	2000	en
dc.identifier.issn	0168-583X	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/25920
dc.subject	Rutherford backscattering	en
dc.subject	thin films	en
dc.subject	optical filters	en
dc.subject.classification	Instruments & Instrumentation	en
dc.subject.classification	Nuclear Science & Technology	en
dc.subject.classification	Physics, Atomic, Molecular & Chemical	en
dc.subject.classification	Physics, Nuclear	en
dc.title	Characterization of optical UV filters using Rutherford backscattering spectroscopy	en
heal.type	journalArticle	en
heal.language	English	en
heal.publicationDate	2000	en
heal.abstract	Rutherford backscattering spectroscopy (RBS) has been used during the development of multilayer thin film optical filters, especially designed for the fluorescence detector of the Pierre AUGER Project. Depth profiles of the heavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness and density of the individual layers and deviations from the desired thickness and stoichiometry have been deduced. The findings of the RES method have been compared and discussed with results obtained by other characterization techniques. (C) 2000 Elsevier Science B.V. All rights reserved.Rutherford backscattering spectroscopy (RBS) has been used during the development of multilayer thin film optical filters, especially designed for the fluorescence detector of the Pierre AUGER Project. Depth profiles of the heavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness and density of the individual layers and deviations from the desired thickness and stoichiometry have been deduced. The findings of the RES method have been compared and discussed with results obtained by other characterization techniques. (C) 2000 Elsevier Science B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS	en
dc.identifier.isi	ISI:000086204100111	en
dc.identifier.volume	161	en
dc.identifier.spage	590	en
dc.identifier.epage	594	en