Engineering properties of fully sp 3- to sp 2-bonded carbon films and their modifications after post-growth ion irradiation

Logothetidis, S; Charitidis, C; Patsalas, P

dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Patsalas, P	en
dc.date.accessioned	2014-03-01T01:51:31Z
dc.date.available	2014-03-01T01:51:31Z
dc.date.issued	2002	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/26339
dc.subject	Amorphous Carbon	en
dc.subject	Binding Energy	en
dc.subject	Elastic Modulus	en
dc.subject	Ion Beam	en
dc.subject	Ion Irradiation	en
dc.subject	Low Energy	en
dc.subject	Magnetron Sputtering	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Thin Film Deposition	en
dc.subject	X Ray Reflectivity	en
dc.title	Engineering properties of fully sp 3- to sp 2-bonded carbon films and their modifications after post-growth ion irradiation	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0925-9635(01)00575-1	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0925-9635(01)00575-1	en
heal.publicationDate	2002	en
heal.abstract	Amorphous carbon (a-C) and tetrahedral a-C (ta-C) thin films deposited by e-beam evaporation, magnetron sputtering and cathodic vacuum arc were studied. The techniques applied here produce films exhibiting a wide range of density (1.75–3.23 g/cm3), sp3 content (∼5–90%) and hardness (∼2–45 GPa). The films hardness (H) and elastic modulus were studied by nano-indentation employing continuous stiffness measurements (CSM) and a	en
heal.journalName	Diamond and Related Materials	en
dc.identifier.doi	10.1016/S0925-9635(01)00575-1	en