Mechanical performance and growth characteristics of boron nitride films with respect to their optical, compositional properties and density

Panayiotatos, Y; Patsalas, P; Charitidis, C; Logothetidis, S

dc.contributor.author	Panayiotatos, Y	en
dc.contributor.author	Patsalas, P	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Logothetidis, S	en
dc.date.accessioned	2014-03-01T01:51:37Z
dc.date.available	2014-03-01T01:51:37Z
dc.date.issued	2002	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/26374
dc.subject	Boron Nitride	en
dc.subject	Growth Mechanism	en
dc.subject	Growth Process	en
dc.subject	Magnetron Sputtering	en
dc.subject	Refractive Index	en
dc.subject	Rf Magnetron Sputtering	en
dc.subject	Room Temperature	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Wear Resistance	en
dc.subject	X Ray Reflectivity	en
dc.title	Mechanical performance and growth characteristics of boron nitride films with respect to their optical, compositional properties and density	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0257-8972(01)01624-3	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0257-8972(01)01624-3	en
heal.publicationDate	2002	en
heal.abstract	We present a study of the growth processes of sputtered BN films, deposited on c-Si (001) substrates, at room temperature (RT) by rf magnetron sputtering. Nanoindentation (hardness ∼21 GPa), density (∼2.6 g/cm3) and roughness by X-ray reflectivity and stress measurements indicated the existence of sp3-bonded BN with properties similar to those of crystalline BN being superior for optical applications due	en
heal.journalName	Surface & Coatings Technology	en
dc.identifier.doi	10.1016/S0257-8972(01)01624-3	en