On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems

Gioti, M; Logothetidis, S; Charitidis, C; Panayiotatos, Y; Varsano, I

dc.contributor.author	Gioti, M	en
dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Panayiotatos, Y	en
dc.contributor.author	Varsano, I	en
dc.date.accessioned	2014-03-01T01:51:41Z
dc.date.available	2014-03-01T01:51:41Z
dc.date.issued	2002	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/26385
dc.subject	Amorphous Carbon	en
dc.subject	Antireflection Coating	en
dc.subject	Boron Nitride	en
dc.subject	Optical Coating	en
dc.subject	Optical Properties	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Wear Resistance	en
dc.subject	Electron Beam	en
dc.title	On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/S0924-4247(01)00887-1	en
heal.identifier.secondary	http://dx.doi.org/10.1016/S0924-4247(01)00887-1	en
heal.publicationDate	2002	en
heal.abstract	In this work we investigate the applicability of sputtered developed films belonging to diamond related materials, like amorphous carbon (a-C), carbon nitride (CNx), and boron nitride (BNx) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of optical transparency (low absorption in the VIS energy region) with the high hardness and wear resistant character of	en
heal.journalName	Sensors and Actuators A-physical	en
dc.identifier.doi	10.1016/S0924-4247(01)00887-1	en