dc.contributor.author |
Charitidis, C |
en |
dc.contributor.author |
Panayiotatos, Y |
en |
dc.contributor.author |
Logothetidis, S |
en |
dc.date.accessioned |
2014-03-01T01:52:26Z |
|
dc.date.available |
2014-03-01T01:52:26Z |
|
dc.date.issued |
2003 |
en |
dc.identifier.uri |
https://dspace.lib.ntua.gr/xmlui/handle/123456789/26619 |
|
dc.subject |
Elastic Modulus |
en |
dc.subject |
Force Measurement |
en |
dc.subject |
Friction Coefficient |
en |
dc.subject |
Magnetron Sputtering |
en |
dc.subject |
Mechanical Property |
en |
dc.subject |
Physical Vapor Deposition |
en |
dc.subject |
Plastic Deformation |
en |
dc.subject |
Room Temperature |
en |
dc.subject |
Wear Resistance |
en |
dc.title |
A quantitative study of the nano-scratch behavior of boron and carbon nitride films |
en |
heal.type |
journalArticle |
en |
heal.identifier.primary |
10.1016/S0925-9635(02)00268-6 |
en |
heal.identifier.secondary |
http://dx.doi.org/10.1016/S0925-9635(02)00268-6 |
en |
heal.publicationDate |
2003 |
en |
heal.abstract |
The nano-scratch tests of amorphous boron and carbon nitride films prepared by r.f. magnetron sputtering onto c-Si (001) substrates, at room temperature, were performed by a Nano Indenter XP system with a lateral-force measuring attachment. The films’ hardness and elastic modulus were determined by nanoindentation employing continuous stiffness measurements. Low load (2–20 mN) scratch tests were used to evaluate the |
en |
heal.journalName |
Diamond and Related Materials |
en |
dc.identifier.doi |
10.1016/S0925-9635(02)00268-6 |
en |