Capacitive-type chemical sensors using thin silicon/polymer bimorph membranes

Chatzandroulis, S; Tegou, E; Goustouridis, D; Polymenakos, S; Tsoukalas, D

dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Tegou, E	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Polymenakos, S	en
dc.contributor.author	Tsoukalas, D	en
dc.date.accessioned	2014-03-01T01:53:17Z
dc.date.available	2014-03-01T01:53:17Z
dc.date.issued	2004	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/26930
dc.subject	Chemical Sensor	en
dc.subject	Vinyl Acetate	en
dc.title	Capacitive-type chemical sensors using thin silicon/polymer bimorph membranes	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.snb.2004.04.078	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.snb.2004.04.078	en
heal.publicationDate	2004	en
heal.abstract	Capacitive-type chemical sensing devices based on a silicon/polymer bimorph structure have been fabricated and evaluated. Upon exposure to analytes, the polymer covering the thin silicon membrane swells, inducing a deflection on the membrane, which is measured as a capacitance change between membrane and substrate. Five different polymer layers [poly-hydroxy-ethyl-methacrylate (PHEMA), poly-methyl-methacrylate (PMMA), poly-vinyl-acetate (PVAc), epoxydized novolac (EPN) and poly-dimethylsiloxane (PDMS)]	en
heal.journalName	Sensors and Actuators B-chemical	en
dc.identifier.doi	10.1016/j.snb.2004.04.078	en