Fabrication of chemical sensors based on Si/polymer bimorphs

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dc.contributor.author Chatzandroulis, S en
dc.contributor.author Tegou, E en
dc.contributor.author Goustouridis, D en
dc.contributor.author Polymenakos, S en
dc.contributor.author Tsoukalas, D en
dc.date.accessioned 2014-03-01T01:53:21Z
dc.date.available 2014-03-01T01:53:21Z
dc.date.issued 2004 en
dc.identifier.uri http://hdl.handle.net/123456789/26974
dc.subject Chemical Sensor en
dc.subject Vinyl Acetate en
dc.title Fabrication of chemical sensors based on Si/polymer bimorphs en
heal.type journalArticle en
heal.identifier.primary 10.1016/j.mee.2004.03.063 en
heal.identifier.secondary http://dx.doi.org/10.1016/j.mee.2004.03.063 en
heal.publicationDate 2004 en
heal.abstract The fabrication and first results of a capacitive type chemical sensor based on a silicon/polymer bimorph structure are described. Upon exposure to analytes the polymer covering the thin silicon membrane swells inducing a deflection on the membrane which is measured as a capacitance change between membrane and substrate. Five different polymer layers [poly-hydroxy-ethyl-methacrylate (PHEMA), poly-methyl-methacrylate (PMMA), poly-vinyl-acetate (PVAc), epoxy-novolac (EPN) en
heal.journalName Microelectronic Engineering en
dc.identifier.doi 10.1016/j.mee.2004.03.063 en

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