Fabrication of chemical sensors based on Si/polymer bimorphs

Chatzandroulis, S; Tegou, E; Goustouridis, D; Polymenakos, S; Tsoukalas, D

dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Tegou, E	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Polymenakos, S	en
dc.contributor.author	Tsoukalas, D	en
dc.date.accessioned	2014-03-01T01:53:21Z
dc.date.available	2014-03-01T01:53:21Z
dc.date.issued	2004	en
dc.identifier.uri	http://hdl.handle.net/123456789/26974
dc.subject	Chemical Sensor	en
dc.subject	Vinyl Acetate	en
dc.title	Fabrication of chemical sensors based on Si/polymer bimorphs	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.mee.2004.03.063	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.mee.2004.03.063	en
heal.publicationDate	2004	en
heal.abstract	The fabrication and first results of a capacitive type chemical sensor based on a silicon/polymer bimorph structure are described. Upon exposure to analytes the polymer covering the thin silicon membrane swells inducing a deflection on the membrane which is measured as a capacitance change between membrane and substrate. Five different polymer layers [poly-hydroxy-ethyl-methacrylate (PHEMA), poly-methyl-methacrylate (PMMA), poly-vinyl-acetate (PVAc), epoxy-novolac (EPN)	en
heal.journalName	Microelectronic Engineering	en
dc.identifier.doi	10.1016/j.mee.2004.03.063	en