Nanoindentation studies of multilayer amorphous carbon films

Logothetidis, S; Kassavetis, S; Charitidis, C; Panayiotatos, Y; Laskarakis, A

dc.contributor.author	Logothetidis, S	en
dc.contributor.author	Kassavetis, S	en
dc.contributor.author	Charitidis, C	en
dc.contributor.author	Panayiotatos, Y	en
dc.contributor.author	Laskarakis, A	en
dc.date.accessioned	2014-03-01T01:53:28Z
dc.date.available	2014-03-01T01:53:28Z
dc.date.issued	2004	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/27023
dc.subject	Amorphous Carbon	en
dc.subject	Elastic Modulus	en
dc.subject	Large Deviation	en
dc.subject	Measurement Technique	en
dc.subject	Mechanical Property	en
dc.subject	Spectroscopic Ellipsometry	en
dc.subject	Thin Film	en
dc.title	Nanoindentation studies of multilayer amorphous carbon films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.carbon.2003.12.054	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.carbon.2003.12.054	en
heal.publicationDate	2004	en
heal.abstract	The mechanical properties of multilayer amorphous carbon thin films, consisted of sequential sp3- and sp2-rich layers developed on c-Si, were investigated by nanoindentation. The total (∼100 nm) and bilayer (14–45 nm) thickness, and the sp3 and sp2 carbon bonded content, were determined by spectroscopic ellipsometry. The continuous stiffness measurements technique was used to measure hardness (H) and elastic modulus (E),	en
heal.journalName	Carbon	en
dc.identifier.doi	10.1016/j.carbon.2003.12.054	en