Effects of energetic species during the growth of nitrogenated amorphous carbon thin films on their nanomechanical properties

Charitidis, C; Patsalas, P; Logothetidis, S

dc.contributor.author	Charitidis, C	en
dc.contributor.author	Patsalas, P	en
dc.contributor.author	Logothetidis, S	en
dc.date.accessioned	2014-03-01T01:54:11Z
dc.date.available	2014-03-01T01:54:11Z
dc.date.issued	2005	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/27241
dc.subject	Amorphous Carbon	en
dc.subject	High Energy	en
dc.subject	Ion Bombardment	en
dc.subject	Magnetron Sputtering	en
dc.subject	Microstructures	en
dc.subject	Nitrogen	en
dc.subject	Thin Film	en
dc.subject	Wear Resistance	en
dc.subject	X Ray Reflectivity	en
dc.subject	Ion Beam Assisted Deposition	en
dc.title	Effects of energetic species during the growth of nitrogenated amorphous carbon thin films on their nanomechanical properties	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.tsf.2004.11.167	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.tsf.2004.11.167	en
heal.publicationDate	2005	en
heal.abstract	Amorphous carbon nitride (CNx) films are promising materials either as wear-resistant or as solid-lubricant coatings, depending on their mechanical and tribological behavior. In this work, we produced amorphous CNx films by reactive magnetron sputtering, and we varied independently the film density, sp3/sp2 content and [N] concentration. The morphology, density and hybridization state of the CNx films were studied ex situ	en
heal.journalName	Thin Solid Films	en
dc.identifier.doi	10.1016/j.tsf.2004.11.167	en