Nanomechanical and nanotribological properties of carbon based films

Charitidis, C; Logothetidis, S

dc.contributor.author	Charitidis, C	en
dc.contributor.author	Logothetidis, S	en
dc.date.accessioned	2014-03-01T01:54:17Z
dc.date.available	2014-03-01T01:54:17Z
dc.date.issued	2005	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/27296
dc.subject	Amorphous Carbon	en
dc.subject	Coefficient of Friction	en
dc.subject	Elastic Modulus	en
dc.subject	Elastic Properties	en
dc.subject	Force Measurement	en
dc.subject	Rf Magnetron Sputtering	en
dc.subject	Stainless Steel	en
dc.title	Nanomechanical and nanotribological properties of carbon based films	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.tsf.2004.11.129	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.tsf.2004.11.129	en
heal.publicationDate	2005	en
heal.abstract	Submicrometer-thick hard amorphous carbon (a-C) and carbon nitride (CNx) films were deposited on Si and stainless steel (SS) substrates by rf magnetron sputtering (MS) and reactive MS, respectively. a-C films were synthesized by either sputtering alternating ultrathin layers of soft and hard a-C on Si or by using a Cr interlayer between a-C and SS substrate. The main purpose of	en
heal.journalName	Thin Solid Films	en
dc.identifier.doi	10.1016/j.tsf.2004.11.129	en