Combination of integrated thermal flow and capacitive pressure sensors for high sensitivity flow measurements in both laminar and turbulent regions

Kaltsas, G; Goustouridis, D; Nassiopoulou, AG; Tsoukalas, D

dc.contributor.author	Kaltsas, G	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Nassiopoulou, AG	en
dc.contributor.author	Tsoukalas, D	en
dc.date.accessioned	2014-03-01T01:54:25Z
dc.date.available	2014-03-01T01:54:25Z
dc.date.issued	2005	en
dc.identifier.issn	17426588	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/27373
dc.title	Combination of integrated thermal flow and capacitive pressure sensors for high sensitivity flow measurements in both laminar and turbulent regions	en
heal.type	journalArticle	en
heal.identifier.primary	10.1088/1742-6596/10/1/068	en
heal.identifier.secondary	http://dx.doi.org/10.1088/1742-6596/10/1/068	en
heal.publicationDate	2005	en
heal.abstract	A combination of a silicon thermal flow and two capacitive pressure sensors placed in a specially designed housing, is proposed for high sensitivity flow measurements in both laminar and turbulent flows. The system of these sensors can determine the transition point between laminar and turbulent region with sufficient accuracy. The pressure distribution in the flow tube was studied in detail experimentally by using a series of pressure sensors. Analytical and simulation results were extracted for different sensor configurations in the flow system. The influence of the position of the sensor in the flow tube, as well as the pressure profile at the surface of the sensor die, was studied and the optimum conditions were found. Good agreement between experimental results and theory was found. © 2005 IOP Publishing Ltd.	en
heal.journalName	Journal of Physics: Conference Series	en
dc.identifier.doi	10.1088/1742-6596/10/1/068	en
dc.identifier.volume	10	en
dc.identifier.issue	1	en
dc.identifier.spage	277	en
dc.identifier.epage	280	en