Finite element analysis of micro-electro-mechanical systems: Towards the integration of MEMS in design and robust optimal control schemes of smart microstructures

Sakellaris, JK

dc.contributor.author	Sakellaris, JK	en
dc.date.accessioned	2014-03-01T01:57:07Z
dc.date.available	2014-03-01T01:57:07Z
dc.date.issued	2008	en
dc.identifier.issn	19918747	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/28357
dc.relation.uri	http://www.scopus.com/inward/record.url?eid=2-s2.0-78651563983&partnerID=40&md5=df9f32c475bb57bc8408a0ed194c913a	en
dc.subject	Active structural control	en
dc.subject	ANSYS software	en
dc.subject	Bi-stable electromagnetic actuation	en
dc.subject	Composite structure	en
dc.subject	Coupled problems	en
dc.subject	Finite Element Analysis	en
dc.subject	Micro-actuator	en
dc.subject	Micro-electro-mechanical Systems	en
dc.subject	Piezoelectric layer	en
dc.subject	Simulation	en
dc.subject	Smart beam	en
dc.subject	UV-LIGA technology	en
dc.subject.other	Active structural control	en
dc.subject.other	ANSYS software	en
dc.subject.other	Bi-stable electromagnetic actuation	en
dc.subject.other	Composite structure	en
dc.subject.other	Coupled problems	en
dc.subject.other	Finite Element Analysis	en
dc.subject.other	Micro-actuator	en
dc.subject.other	Micro-electro-mechanical Systems	en
dc.subject.other	Piezoelectric layer	en
dc.subject.other	Simulation	en
dc.subject.other	Smart beam	en
dc.subject.other	UV-LIGA technology	en
dc.subject.other	Actuators	en
dc.subject.other	Beams and girders	en
dc.subject.other	Composite structures	en
dc.subject.other	Computer software	en
dc.subject.other	Concurrency control	en
dc.subject.other	Coupled circuits	en
dc.subject.other	Design	en
dc.subject.other	Dynamical systems	en
dc.subject.other	Electromechanical devices	en
dc.subject.other	Finite element method	en
dc.subject.other	Integration	en
dc.subject.other	Intelligent structures	en
dc.subject.other	Intersections	en
dc.subject.other	Machine design	en
dc.subject.other	Mechanical engineering	en
dc.subject.other	Mechanics	en
dc.subject.other	Mechatronics	en
dc.subject.other	MEMS	en
dc.subject.other	Microactuators	en
dc.subject.other	Microelectromechanical devices	en
dc.subject.other	Molecular electronics	en
dc.subject.other	Nanotechnology	en
dc.subject.other	Numerical methods	en
dc.subject.other	Optimal control systems	en
dc.subject.other	Piezoelectric actuators	en
dc.subject.other	Piezoelectric devices	en
dc.subject.other	Piezoelectric transducers	en
dc.subject.other	Piezoelectricity	en
dc.subject.other	Polarization	en
dc.subject.other	Programming theory	en
dc.subject.other	Sensors	en
dc.subject.other	Structural dynamics	en
dc.subject.other	Structure (composition)	en
dc.subject.other	Technology	en
dc.subject.other	Thickness measurement	en
dc.subject.other	Composite micromechanics	en
dc.title	Finite element analysis of micro-electro-mechanical systems: Towards the integration of MEMS in design and robust optimal control schemes of smart microstructures	en
heal.type	journalArticle	en
heal.publicationDate	2008	en
heal.abstract	Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into ""Nanoelectromechanical"" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a micrometer (a millionth of a meter) to a millimeter (thousandth of a meter). At these size scales, the standard constructs of classical physics do not always hold true. Due to MEMS' large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass. Finite element analysis is an important part of MEMS design. The paper presents the design of a vibration control mechanism for a beam with bonded piezoelectric sensors and actuators and an application of the arising smart structure for vibrations suppression too. The mechanical modelling of the structure and the subsequent finite element approximation are based on Hamilton's principle and classical engineering theory for bending of beams in connection with simplified modelling of piezoelectric sensors and actuators. Two control schemes LQR and H2 are considered. The latter robust controller takes into account uncertainties of the dynamical system and moreover incompleteness of the measured information, it therefore leads to applicable design of smart structures. The numerical simulation shows that sufficient vibration suppression can be achieved by means of the proposed general methods. It is given as a perspective to the MEMS technology towards the direction of integrating MEMS in design and robust optimal control schemes.	en
heal.journalName	WSEAS Transactions on Applied and Theoretical Mechanics	en
dc.identifier.volume	3	en
dc.identifier.issue	4	en
dc.identifier.spage	114	en
dc.identifier.epage	124	en