Nanomechanical properties of thick porous silicon layers grown on p- and p plus -type bulk crystalline Si

Charitidis, CA; Skarmoutsou, A; Nassiopoulou, AG; Dragoneas, A

dc.contributor.author	Charitidis, CA	en
dc.contributor.author	Skarmoutsou, A	en
dc.contributor.author	Nassiopoulou, AG	en
dc.contributor.author	Dragoneas, A	en
dc.date.accessioned	2014-03-01T02:05:26Z
dc.date.available	2014-03-01T02:05:26Z
dc.date.issued	2011	en
dc.identifier.issn	0921-5093	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/29481
dc.subject	Porous silicon membranes	en
dc.subject	Hardness	en
dc.subject	Young's modulus	en
dc.subject	Nanoindentation	en
dc.subject.classification	Nanoscience & Nanotechnology	en
dc.subject.classification	Materials Science, Multidisciplinary	en
dc.subject.other	MECHANICAL-PROPERTIES	en
dc.subject.other	PHASE-TRANSFORMATION	en
dc.subject.other	THERMAL ISOLATION	en
dc.subject.other	NANOINDENTATION TECHNIQUES	en
dc.subject.other	INTEGRATED INDUCTORS	en
dc.subject.other	AMORPHOUS-SILICON	en
dc.subject.other	HIGH-PRESSURE	en
dc.subject.other	POP-IN	en
dc.subject.other	INDENTATION	en
dc.subject.other	BEHAVIOR	en
dc.title	Nanomechanical properties of thick porous silicon layers grown on p- and p plus -type bulk crystalline Si	en
heal.type	journalArticle	en
heal.language	English	en
heal.publicationDate	2011	en
heal.abstract	The nanomechanical properties and the nanoscale deformation of thick porous Si (PSi) layers of two different morphologies, grown electrochemically on p-type and p+-type Si wafers were investigated by the depth-sensing nanoindentation technique over a small range of loads using a Berkovich indenter and were compared with those of bulk crystalline Si. The microstructure of the thick PSi layers was characterized by field emission scanning electron microscopy. PSi layers on p+-type Si show an anisotropic mesoporous structure with straight vertical pores of diameter in the range of 30-50 nm, while those on p-type Si show a sponge like mesoporous structure. The effect of the microstructure on the mechanical properties of the layers is discussed. It is shown that the hardness and Young's modulus of the PSi layers exhibit a strong dependence on their microstructure. In particular, PSi layers with the anisotropic straight vertical pores show higher hardness and elastic modulus values than sponge-like layers. However, sponge-like PSi layers reveal less plastic deformation and higher wear resistance compared with layers with straight vertical pores. (C) 2011 Elsevier B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE SA	en
heal.journalName	MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING	en
dc.identifier.isi	ISI:000296676800053	en
dc.identifier.volume	528	en
dc.identifier.issue	29-30	en
dc.identifier.spage	8715	en
dc.identifier.epage	8722	en