Self-aligned process for the development of surface stress capacitive biosensor arrays

Tsouti, V; Filippidou, MK; Boutopoulos, C; Broutas, P; Zergioti, I; Chatzandroulis, S

dc.contributor.author	Tsouti, V	en
dc.contributor.author	Filippidou, MK	en
dc.contributor.author	Boutopoulos, C	en
dc.contributor.author	Broutas, P	en
dc.contributor.author	Zergioti, I	en
dc.contributor.author	Chatzandroulis, S	en
dc.date.accessioned	2014-03-01T02:14:37Z
dc.date.available	2014-03-01T02:14:37Z
dc.date.issued	2012	en
dc.identifier.issn	09254005	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/30066
dc.subject	Biosensor array fabrication	en
dc.subject	Capacitive micro-membranes	en
dc.subject	Self-alignment	en
dc.subject	Silicon fusion bonding	en
dc.subject.other	Biological interactions	en
dc.subject.other	Biosensing	en
dc.subject.other	Biosensor arrays	en
dc.subject.other	Capacitive biosensors	en
dc.subject.other	Capacitive micro-membranes	en
dc.subject.other	Fabrication process	en
dc.subject.other	Flexible membranes	en
dc.subject.other	Fusion bonding	en
dc.subject.other	Membrane surface	en
dc.subject.other	Probe molecules	en
dc.subject.other	Self aligned process	en
dc.subject.other	Self alignment	en
dc.subject.other	Surface stress	en
dc.subject.other	Alignment	en
dc.subject.other	Membranes	en
dc.subject.other	Oligonucleotides	en
dc.subject.other	Sensors	en
dc.subject.other	Surface properties	en
dc.subject.other	Biosensors	en
dc.title	Self-aligned process for the development of surface stress capacitive biosensor arrays	en
heal.type	journalArticle	en
heal.identifier.primary	10.1016/j.snb.2011.12.028	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.snb.2011.12.028	en
heal.publicationDate	2012	en
heal.abstract	A new fabrication process and first experimental results of a surface stress based capacitive biosensor array are presented. Flexible membranes and a fixed electrode on the substrate constitute the capacitive sensors. Probe molecules are immobilized on the membrane surface and the surface stress variations during biological interactions force the membrane to deflect and effectively change the capacitance between the flexible membrane and the fixed substrate. The array consists of 60 sensors and thus is suitable for parallel sensing. The process is characterized by the self-alignment of the sensitive flexible membranes and the use of silicon fusion bonding to fabricate the complete device. First experimental results on biosensing indicate that the sensors are able to detect the hybridization of beta-thalassemia oligonucleotides. © 2012 Elsevier B.V. All rights reserved.	en
heal.journalName	Sensors and Actuators, B: Chemical	en
dc.identifier.doi	10.1016/j.snb.2011.12.028	en
dc.identifier.volume	166-167	en
dc.identifier.spage	815	en
dc.identifier.epage	818	en