A capacitive biosensor based on ultrathin si membranes

Tsouti, V; Goustouridis, D; Chatzandroulis, S; Normand, P; Andreakou, P; Ioannou, M; Kafetzopoulos, D; Boutopoulos, C; Zergioti, I; Tsoukalas, D; Hue, J; Rousier, R

dc.contributor.author	Tsouti, V	en
dc.contributor.author	Goustouridis, D	en
dc.contributor.author	Chatzandroulis, S	en
dc.contributor.author	Normand, P	en
dc.contributor.author	Andreakou, P	en
dc.contributor.author	Ioannou, M	en
dc.contributor.author	Kafetzopoulos, D	en
dc.contributor.author	Boutopoulos, C	en
dc.contributor.author	Zergioti, I	en
dc.contributor.author	Tsoukalas, D	en
dc.contributor.author	Hue, J	en
dc.contributor.author	Rousier, R	en
dc.date.accessioned	2014-03-01T02:45:00Z
dc.date.available	2014-03-01T02:45:00Z
dc.date.issued	2008	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/32095
dc.subject	Surface Stress	en
dc.subject.other	Biological interactions	en
dc.subject.other	Biological targets	en
dc.subject.other	Biomolecular interactions	en
dc.subject.other	Capacitive biosensors	en
dc.subject.other	Device capacitance	en
dc.subject.other	Surface stress	en
dc.subject.other	Ultra-thin	en
dc.subject.other	Ultrathin silicon membrane	en
dc.subject.other	Signal transduction	en
dc.subject.other	Surface properties	en
dc.subject.other	Biosensors	en
dc.title	A capacitive biosensor based on ultrathin si membranes	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1109/ICSENS.2008.4716421	en
heal.identifier.secondary	http://dx.doi.org/10.1109/ICSENS.2008.4716421	en
heal.identifier.secondary	4716421	en
heal.publicationDate	2008	en
heal.abstract	A biosensor which takes advantage of surface stress changes during biological interactions and is able to translate them into a capacitive signal is presented. The sensor consists of an ultrathin silicon membrane on which receptor molecules are immobilized. During biomolecular interactions, the surface stress changes and the membrane deflects resulting in a change in device capacitance. The biosensor is part of a 16x16 array thus allowing for the making of larger assays with the concurrent sensing of multiple biological targets. First results using the biotin-steptavidin system are presented. © 2008 IEEE.	en
heal.journalName	Proceedings of IEEE Sensors	en
dc.identifier.doi	10.1109/ICSENS.2008.4716421	en
dc.identifier.spage	223	en
dc.identifier.epage	226	en