Browsing Διδακτορικές Διατριβές by Author "0000-0002-0558-9972"

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Multi-scale modelling and experimental analysis of ALD alumina: Interplay of process dynamics, chemistry and interfacial phenomena

Gakis, Georgios-Pavlos; Γάκης, Γεώργιος-Παύλος (2020-03-12)

The constant shrinking of microelectronic devices requires the production of conformal and uniform nanometric thin films, with a high chemical purity and abrupt interfaces. In this context, Atomic Layer Deposition (ALD) ...