Design and development of a low-cost interferometric device for nanoscale position and velocity feedback

Felekis, D; Papadopoulos, E

dc.contributor.author	Felekis, D	en
dc.contributor.author	Papadopoulos, E	en
dc.date.accessioned	2014-03-01T02:46:45Z
dc.date.available	2014-03-01T02:46:45Z
dc.date.issued	2010	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/32824
dc.subject	Fringe counting	en
dc.subject	Michelson interferometer	en
dc.subject	Nanoscale position feedback	en
dc.subject	Piezoelectric actuators	en
dc.subject.other	Control inputs	en
dc.subject.other	Design and Development	en
dc.subject.other	Displacement and velocity feedback	en
dc.subject.other	Embedded strain gages	en
dc.subject.other	Fringe counting	en
dc.subject.other	Initial design	en
dc.subject.other	Micromechanisms	en
dc.subject.other	Micropositioner	en
dc.subject.other	Microrobots	en
dc.subject.other	Nano scale	en
dc.subject.other	Nm resolution	en
dc.subject.other	Position and velocity control	en
dc.subject.other	Sensing elements	en
dc.subject.other	Silicon photodiode	en
dc.subject.other	Velocity feedback	en
dc.subject.other	Asymptotic analysis	en
dc.subject.other	Cantilever beams	en
dc.subject.other	Gages	en
dc.subject.other	Intelligent mechatronics	en
dc.subject.other	Interferometry	en
dc.subject.other	Mechatronics	en
dc.subject.other	Michelson interferometers	en
dc.subject.other	Nanostructured materials	en
dc.subject.other	Optical instruments	en
dc.subject.other	Photodiodes	en
dc.subject.other	Piezoelectricity	en
dc.subject.other	Piezoelectric actuators	en
dc.title	Design and development of a low-cost interferometric device for nanoscale position and velocity feedback	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1109/AIM.2010.5695896	en
heal.identifier.secondary	http://dx.doi.org/10.1109/AIM.2010.5695896	en
heal.identifier.secondary	5695896	en
heal.publicationDate	2010	en
heal.abstract	A low-cost interferometer for piezoelectric actuator (PEA) displacement and velocity feedback was developed and described here. An initial design employed a single photodiode as a sensing element. Although fringes could be measured successfully, to obtain the direction of displacement, the PEA control input was needed. A low-cost interferometric encoder is developed that employs a pair of silicon photodiodes and a manual micropositioner stage. With this system, the actuator input is not needed for direction determination, while a 158.2 nm resolution is achieved. Algorithms for the single photodiode and for the interferometric encoder were developed and are described in detail. The results were verified using a PEA-embedded strain gage. The developed device can be used for PEA characterization and for real-time position and velocity control of micromechanisms and microrobots. © 2010 IEEE.	en
heal.journalName	IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM	en
dc.identifier.doi	10.1109/AIM.2010.5695896	en
dc.identifier.spage	611	en
dc.identifier.epage	616	en