Lateral resolution of the NFESE microscopy and the existence of self focusing of electrons

Kyritsakis, A; Xanthakis, JP; Kirk, TL; Pescia, D

dc.contributor.author	Kyritsakis, A	en
dc.contributor.author	Xanthakis, JP	en
dc.contributor.author	Kirk, TL	en
dc.contributor.author	Pescia, D	en
dc.date.accessioned	2014-03-01T02:47:23Z
dc.date.available	2014-03-01T02:47:23Z
dc.date.issued	2011	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/33117
dc.relation.uri	http://www.scopus.com/inward/record.url?eid=2-s2.0-80052887262&partnerID=40&md5=6442c9decbec028869564bb39831c2c9	en
dc.relation.uri	http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6004542	en
dc.relation.uri	http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=06004542	en
dc.subject	Microscope resolution	en
dc.subject	NFESEM	en
dc.subject	Transmission coefficient	en
dc.subject	WKB	en
dc.subject.other	3-dimensional	en
dc.subject.other	Experimental values	en
dc.subject.other	Highly sensitive	en
dc.subject.other	Lateral resolution	en
dc.subject.other	Microscope resolution	en
dc.subject.other	Near-field emission	en
dc.subject.other	NFESEM	en
dc.subject.other	Self-focusing	en
dc.subject.other	Sharp tip	en
dc.subject.other	Transmission coefficient	en
dc.subject.other	WKB	en
dc.subject.other	WKB approximations	en
dc.subject.other	Approximation theory	en
dc.subject.other	Electron beams	en
dc.subject.other	Nanoelectronics	en
dc.subject.other	Vacuum	en
dc.subject.other	Focusing	en
dc.title	Lateral resolution of the NFESE microscopy and the existence of self focusing of electrons	en
heal.type	conferenceItem	en
heal.identifier.secondary	6004542	en
heal.publicationDate	2011	en
heal.abstract	We have calculated the lateral resolution (LR) of the electron beams emitted from sharp tips used in the near field emission SEM (NFESEM). To this end we have simulated the tip as an ellipsoid and have used a 3-dimensional WKB approximation. We find a self focusing of the electron beam which can explain the small experimental values of the observed LR of the NFESEM. This self focusing is highly sensitive on the sharpness S=R1/R2 of the tip where R1 and R2 are the big and small radius of the ellipsoid simulating the tip. However it is not sensitive on any particular radius alone.	en
heal.journalName	Proceedings - IVNC 2011: 2011 24th International Vacuum Nanoelectronics Conference	en
dc.identifier.spage	21	en
dc.identifier.epage	22	en