ZnO nanoparticles produced by novel reactive physical deposition process

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dc.contributor.author Thangadurai, P en
dc.contributor.author Zergioti, I en
dc.contributor.author Saranu, S en
dc.contributor.author Chandrinou, C en
dc.contributor.author Yang, Z en
dc.contributor.author Tsoukalas, D en
dc.contributor.author Kean, A en
dc.contributor.author Boukos, N en
dc.date.accessioned 2014-03-01T02:47:31Z
dc.date.available 2014-03-01T02:47:31Z
dc.date.issued 2011 en
dc.identifier.issn 0169-4332 en
dc.identifier.uri http://hdl.handle.net/123456789/33195
dc.subject Photoluminescence en
dc.subject ZnO particles en
dc.subject.classification Chemistry, Physical en
dc.subject.classification Materials Science, Coatings & Films en
dc.subject.classification Physics, Applied en
dc.subject.classification Physics, Condensed Matter en
dc.subject.other Average particle size en
dc.subject.other Controlled size en
dc.subject.other Deposition process en
dc.subject.other Different substrates en
dc.subject.other GaAs en
dc.subject.other He-Cd lasers en
dc.subject.other Hexagonal structures en
dc.subject.other In-line en
dc.subject.other Interstitials en
dc.subject.other Intrinsic point defects en
dc.subject.other Particle densities en
dc.subject.other Photoluminescence measurements en
dc.subject.other Quartz crystal monitors en
dc.subject.other Room temperature en
dc.subject.other Single-crystalline en
dc.subject.other Sputtering target en
dc.subject.other Surface density en
dc.subject.other UV emissions en
dc.subject.other ZnO en
dc.subject.other ZnO nanoparticles en
dc.subject.other ZnO particles en
dc.subject.other DC power transmission en
dc.subject.other Gallium alloys en
dc.subject.other Laser excitation en
dc.subject.other Magnetrons en
dc.subject.other Molecular oxygen en
dc.subject.other Optical properties en
dc.subject.other Photoluminescence en
dc.subject.other Point defects en
dc.subject.other Quartz en
dc.subject.other Transmission electron microscopy en
dc.subject.other Zinc en
dc.subject.other Zinc oxide en
dc.subject.other Nanoparticles en
dc.title ZnO nanoparticles produced by novel reactive physical deposition process en
heal.type conferenceItem en
heal.identifier.primary 10.1016/j.apsusc.2010.12.001 en
heal.identifier.secondary http://dx.doi.org/10.1016/j.apsusc.2010.12.001 en
heal.language English en
heal.publicationDate 2011 en
heal.abstract This paper reports the deposition of ZnO nanoparticles with controlled sizes and different particle densities and their structural, composition and optical properties. They were deposited by means of a DC magnetron based vacuum nanoparticle source onto different substrates (GaAs, Si and Ti/SiO2/Si). We believe that this is the first time that such nanoparticles have been produced using this unique technique. Zinc was used as sputtering target to produce zinc nanoparticles which were oxidized in-line using molecular oxygen. The structural properties and chemistry of the ZnO were studied by transmission electron microscopy. An average particle size of 6(+/- 2) nm was produced with uniform size distribution. The particle density was controlled using a quartz crystal monitor. Surface densities of 2.3x10(11)/cm(2), 1.1x10(13)/cm(2) and 3.9x10(13)/cm(2) were measured for three different deposition runs. The ZnO particles were found to be single crystalline having hexagonal structure. Photoluminescence measurements of all samples were performed at room temperature using a cw He-Cd laser at 325nm excitation. The UV emission around 375nm at room temperature is due to excitonic recombination and the broad emission centered at 520nm may be attributed to intrinsic point defects such as oxygen interstitials. (C) 2010 Elsevier B.V. All rights reserved. en
heal.publisher ELSEVIER SCIENCE BV en
heal.journalName Applied Surface Science en
dc.identifier.doi 10.1016/j.apsusc.2010.12.001 en
dc.identifier.isi ISI:000288007500053 en
dc.identifier.volume 257 en
dc.identifier.issue 12 en
dc.identifier.spage 5366 en
dc.identifier.epage 5369 en

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