ZnO nanoparticles produced by novel reactive physical deposition process

Thangadurai, P; Zergioti, I; Saranu, S; Chandrinou, C; Yang, Z; Tsoukalas, D; Kean, A; Boukos, N

dc.contributor.author	Thangadurai, P	en
dc.contributor.author	Zergioti, I	en
dc.contributor.author	Saranu, S	en
dc.contributor.author	Chandrinou, C	en
dc.contributor.author	Yang, Z	en
dc.contributor.author	Tsoukalas, D	en
dc.contributor.author	Kean, A	en
dc.contributor.author	Boukos, N	en
dc.date.accessioned	2014-03-01T02:47:31Z
dc.date.available	2014-03-01T02:47:31Z
dc.date.issued	2011	en
dc.identifier.issn	0169-4332	en
dc.identifier.uri	https://dspace.lib.ntua.gr/xmlui/handle/123456789/33195
dc.subject	Photoluminescence	en
dc.subject	ZnO particles	en
dc.subject.classification	Chemistry, Physical	en
dc.subject.classification	Materials Science, Coatings & Films	en
dc.subject.classification	Physics, Applied	en
dc.subject.classification	Physics, Condensed Matter	en
dc.subject.other	Average particle size	en
dc.subject.other	Controlled size	en
dc.subject.other	Deposition process	en
dc.subject.other	Different substrates	en
dc.subject.other	GaAs	en
dc.subject.other	He-Cd lasers	en
dc.subject.other	Hexagonal structures	en
dc.subject.other	In-line	en
dc.subject.other	Interstitials	en
dc.subject.other	Intrinsic point defects	en
dc.subject.other	Particle densities	en
dc.subject.other	Photoluminescence measurements	en
dc.subject.other	Quartz crystal monitors	en
dc.subject.other	Room temperature	en
dc.subject.other	Single-crystalline	en
dc.subject.other	Sputtering target	en
dc.subject.other	Surface density	en
dc.subject.other	UV emissions	en
dc.subject.other	ZnO	en
dc.subject.other	ZnO nanoparticles	en
dc.subject.other	ZnO particles	en
dc.subject.other	DC power transmission	en
dc.subject.other	Gallium alloys	en
dc.subject.other	Laser excitation	en
dc.subject.other	Magnetrons	en
dc.subject.other	Molecular oxygen	en
dc.subject.other	Optical properties	en
dc.subject.other	Photoluminescence	en
dc.subject.other	Point defects	en
dc.subject.other	Quartz	en
dc.subject.other	Transmission electron microscopy	en
dc.subject.other	Zinc	en
dc.subject.other	Zinc oxide	en
dc.subject.other	Nanoparticles	en
dc.title	ZnO nanoparticles produced by novel reactive physical deposition process	en
heal.type	conferenceItem	en
heal.identifier.primary	10.1016/j.apsusc.2010.12.001	en
heal.identifier.secondary	http://dx.doi.org/10.1016/j.apsusc.2010.12.001	en
heal.language	English	en
heal.publicationDate	2011	en
heal.abstract	This paper reports the deposition of ZnO nanoparticles with controlled sizes and different particle densities and their structural, composition and optical properties. They were deposited by means of a DC magnetron based vacuum nanoparticle source onto different substrates (GaAs, Si and Ti/SiO2/Si). We believe that this is the first time that such nanoparticles have been produced using this unique technique. Zinc was used as sputtering target to produce zinc nanoparticles which were oxidized in-line using molecular oxygen. The structural properties and chemistry of the ZnO were studied by transmission electron microscopy. An average particle size of 6(+/- 2) nm was produced with uniform size distribution. The particle density was controlled using a quartz crystal monitor. Surface densities of 2.3x10(11)/cm(2), 1.1x10(13)/cm(2) and 3.9x10(13)/cm(2) were measured for three different deposition runs. The ZnO particles were found to be single crystalline having hexagonal structure. Photoluminescence measurements of all samples were performed at room temperature using a cw He-Cd laser at 325nm excitation. The UV emission around 375nm at room temperature is due to excitonic recombination and the broad emission centered at 520nm may be attributed to intrinsic point defects such as oxygen interstitials. (C) 2010 Elsevier B.V. All rights reserved.	en
heal.publisher	ELSEVIER SCIENCE BV	en
heal.journalName	Applied Surface Science	en
dc.identifier.doi	10.1016/j.apsusc.2010.12.001	en
dc.identifier.isi	ISI:000288007500053	en
dc.identifier.volume	257	en
dc.identifier.issue	12	en
dc.identifier.spage	5366	en
dc.identifier.epage	5369	en